基本信息:
- 专利标题： 전하 캐리어 빔의 빔 매개변수 측정 방법, 측정 장치 및 전하 캐리어 빔 장치
- 专利标题（英）：Method for determining beam parameters of a charge carrier beam, measuring device, and charge carrier beam device
- 专利标题（中）：用于确定充电载波波束，测量装置和充电载波波束装置的波束参数的方法
- 申请号：KR1020147028508 申请日：2013-03-11
- 公开(公告)号：KR1020150015437A 公开(公告)日：2015-02-10
- 发明人： 라이스겐,우베 , 드브리스,옌스 , 박하우스,알렉산더 , 바우어,한스-페터 , 우퍼,세바스티안 , 라이헨베륵,베른트 , 슈미츠-켐펜,토어스텐
- 申请人： 알더블유티에이치 아헨 , 엑삭트 시스템스 게엠베하
- 申请人地址： Templergraben **, ***** Aachen Germany
- 专利权人： 알더블유티에이치 아헨,엑삭트 시스템스 게엠베하
- 当前专利权人： 알더블유티에이치 아헨,엑삭트 시스템스 게엠베하
- 当前专利权人地址： Templergraben **, ***** Aachen Germany
- 代理人： 특허법인오리진
- 优先权： DE10 2012 102 6084 2012-03-27
- 国际申请： PCT/DE2013/100091 2013-03-11
- 国际公布： WO2013143531 2013-10-03
- 主分类号： B23K15/00
- IPC分类号： B23K15/00 ; G01T1/29 ; H01J37/244 ; H01J37/31
The present invention relates to a method of measuring the beam parameters of the charge carrier beam parameters, the measuring device and the charge-carrier beam device. Charge carrier beam (4) of the charge carrier beam device (1) is provided in the diaphragm (7) and the slit diaphragm system having at least one slit diaphragm (8), is guided by a beam deflection unit (3). Measure the coordinate-measuring surface of the beam components passing through the slit diaphragm system. If the measurement-based on the coordinate, such that the measured diaphragm (9) is moved in a predetermined measurement reference point arranged in the diaphragm device, the diaphragm device is automatically moved. Beam parameter is measured over a measuring diaphragm. In the measuring apparatus 5 to perform the method described above, the slit diaphragm system at least comprises two slit diaphragm sections (12, 13, 15, 16) are not parallel to one another, this section is a single continuous slit diaphragm It may be applicable.
信息查询:
EspacenetIPC结构图谱:
| B | 作业；运输 |
| --B23 | 机床；不包含在其他类目中的金属加工 |
| ----B23K | 钎焊或脱焊；焊接；用钎焊或焊接方法包覆或镀敷；局部加热切割，如火焰切割；用激光束加工 |
| ------B23K15/00 | 电子束焊接或切割 |