基本信息:
- 专利标题： 증발 증착 장치
- 专利标题（英）：Evaporation Deposition Apparatus
- 专利标题（中）：蒸发沉积装置
- 申请号：KR1020130039747 申请日：2013-04-11
- 公开(公告)号：KR1020140122838A 公开(公告)日：2014-10-21
- 发明人： 이주인 , 김정형 , 유용심 , 유신재 , 신용현
- 申请人： 한국표준과학연구원
- 申请人地址： 대전 유성구 가정로 ***(가정동, 한국표준과학연구원)
- 专利权人： 한국표준과학연구원
- 当前专利权人： 한국표준과학연구원
- 当前专利权人地址： 대전 유성구 가정로 ***(가정동, 한국표준과학연구원)
- 代理人： 이평우
- 主分类号： H01L51/56
- IPC分类号： H01L51/56 ; H05B33/10 ; C23C14/24
It provides an evaporation apparatus and a method of operation of the present invention. The evaporation unit is first populated for receiving the evaporation material Beattie, first Kane providing steam via the Bt and connecting passage receiving a second cavity, and a second cake formed in Bt and by the steam to the clerk (point source) an outlet for ejecting a radial and formed conductor evaporator, forming a conductor is induced surrounding the through-hole reflection nozzle reflection nozzle and an evaporator, including an increase in the connection to the outlet and increasingly diameter coil, and an alternating-current electric power to the induction coil It includes an AC power supply is applied. Induction coil to induction-heat the evaporator and the evaporation material is evaporated reflection nozzle, steam is discharged through the nozzle reflection.
公开/授权文献:
- KR101465615B1 증발 증착 장치 公开/授权日：2014-11-27