基本信息:
- 专利标题: 테스트 유리 교환기 및 교환 방법
- 专利标题(英):Test glass changing
- 专利标题(中):测试玻璃变化
- 申请号:KR1020147008805 申请日:2012-06-28
- 公开(公告)号:KR1020140058671A 公开(公告)日:2014-05-14
- 发明人: 죌러알폰스 , 하게도른하로 , 비르트에크하르트 , 바인리히베르너 , 그로스토비아스
- 申请人: 뷔흘러 알제나우 게엠베하
- 申请人地址: SIEMENSSTRASSE ** D-***** ALZENAU GERMANY
- 专利权人: 뷔흘러 알제나우 게엠베하
- 当前专利权人: 뷔흘러 알제나우 게엠베하
- 当前专利权人地址: SIEMENSSTRASSE ** D-***** ALZENAU GERMANY
- 代理人: 김태홍
- 优先权: DE10 2011 112 0851 2011-09-02; DE10 2012 010 7943 2012-06-01
- 国际申请: PCT/EP2012/002723 2012-06-28
- 国际公布: WO2013029707 2013-03-07
- 主分类号: G01N21/25
- IPC分类号: G01N21/25 ; G01N21/88 ; G01B11/06 ; C23C14/52 ; G01N21/84
또한, 본 발명은, 테스트 유리 교환기를 이용하여 테스트 유리를 교환하기 위한 방법으로서, 리세스들(7) 중 하나의 리세스 내에 배열된 테스트 유리 요소가 광학 측정 장치의 측정 위치로 이동되기 전에, 제어 장치를 이용하여 마운트(6)의 회전 이동을 유발하는 단계와, 회전 이동에 의해 테스트 유리 요소를 제1 위치로 이동시키는 단계로서, 제1 위치의 측정 위치로부터의 각거리는 리세스들(7) 사이의 각거리보다 작은, 이동 단계와, 센터링 장치(10)를 이용하여 테스트 유리 요소를 측정 위치로 이동시키는 단계를 포함하는 것을 특징으로 하는 테스트 유리 교환 방법에 관한 것이다.
The present invention, in the vacuum coating system as a test glass changer for the optical measurement in the layer properties, the test glass exchanger is at least one movable substrate holder (2 for guiding the substrate to a path at least through one of the stream of coating material ) and, at least it is connected firmly to the rotary spindle (4) to one test glass element and the rotary spindle (4) mounted in the can be rotated relative to the substrate holder (2) to the center (6), at a time one of the a test glass element in the beam path of the optical measurement device and includes a control device for introducing at least one stream of the coating material, the mount (6) is at least one of which is eccentrically offset with respect to the rotary spindle (4) recess 7 a has, mounted 6 of the rotary spindle (4) according to which a rotational movement about this may be caused by the control device, the test glass exchanger, recesses (7) one of Li of test to the test glass elements arranged in the recess characterized in that can be applied to is provided with a centering device 10, the torque and the holding moment is mounted by the centering device (6) to move to the measuring position of the optical measuring device It relates to a glass exchanger.
In addition, prior to the present invention is a method for the exchange of test glass using a test glass exchanger, recesses (7) arranged in the test in one of the recesses of the glass element is moved to the measuring position of the optical measuring device, the method comprising using the control device causing pivotal movement of the mount (6), the angular distance is recessed from the measurement position of a step of moving the test glass element by a rotational movement to the first position, the first position (7 ) and a small, mobile phase than the angular distance between, to a test method for testing a glass replacement glass element by using a centering device (10) characterized in that it comprises the step of moving a measurement position.
公开/授权文献:
- KR101679939B1 테스트 유리 교환기 및 교환 방법 公开/授权日:2016-11-25
信息查询:
EspacenetIPC结构图谱:
G | 物理 |
--G01 | 测量;测试 |
----G01N | 借助于测定材料的化学或物理性质来测试或分析材料 |
------G01N21/00 | 利用光学手段,即利用红外光、可见光或紫外光来测试或分析材料 |
--------G01N21/01 | .便于进行光学测试的装置或仪器 |
----------G01N21/25 | ..颜色;光谱性质,即比较材料对两个或多个不同波长或波段的光的影响 |