基本信息:
- 专利标题： 스크린 인쇄 장치 및 스크린 인쇄 방법
- 专利标题（英）：Screen printing device and screen printing method
- 申请号：KR1020137010114 申请日：2011-10-17
- 公开(公告)号：KR1020130124313A 公开(公告)日：2013-11-13
- 发明人： 아베세이코우 , 야자와다카시
- 申请人： 파나소닉 주식회사
- 申请人地址： ****, Oaza Kadoma, Kadoma-shi, Osaka, Japan
- 专利权人： 파나소닉 주식회사
- 当前专利权人： 파나소닉 주식회사
- 当前专利权人地址： ****, Oaza Kadoma, Kadoma-shi, Osaka, Japan
- 代理人： 강승옥; 송승필
- 优先权： JPJP-P-2010-234321 2010-10-19
- 国际申请： PCT/JP2011/005796 2011-10-17
- 国际公布： WO2012053180 2012-04-26
- 主分类号： B41F15/08
- IPC分类号： B41F15/08 ; B41F15/26 ; B41M1/12 ; H05K3/34
The image pick-up intended for the substrate and the mask plate and two in the captured image pick-up unit with the optical axis to the configuration that moves horizontally, the substrate position by properly correcting a resulting position error due to the movement of the imaging optical axis relative position error and the image pickup unit of between to provide a crystal screen printing apparatus which can improve the accuracy and the screen printing method in order. The substrate and prior to the mark image pick-up steps carried out for the purpose of detecting the position of the recognition mark for positioning of the mask, due to the movement of the optical axis calibration processing step, an image pickup unit for detecting a horizontal relative position between the image pick-up optical axis It executes a correction surface data generating process of detecting a localized displacement of the generated image pick-up optical axis. Prior to the start of production, using a mask for substrates and verification for verification and execution of production before the start of accuracy evaluation step for evaluating the substrate positioning precision, after the start of production, using a for chamber substrate and the actual production for the production of masks, the production start after the start of production to assess the substrate after positioning accuracy and executes accuracy evaluation step.