基本信息:
- 专利标题： 알루미늄 함유막 형성용 조성물 및 알루미늄 함유막의 형성 방법
- 专利标题（英）：Composition for forming aluminum-containing film and method for forming aluminum-containing film
- 专利标题（中）：用于形成含铝薄膜的组合物和形成含铝薄膜的方法
- 申请号：KR1020130022028 申请日：2013-02-28
- 公开(公告)号：KR1020130100734A 公开(公告)日：2013-09-11
- 发明人： 나카가와,히사시 , 사카이,다츠야
- 申请人： 제이에스알 가부시끼가이샤
- 申请人地址： *-*-*, Higashi-Shinbashi, Minato-ku, Tokyo, Japan
- 专利权人： 제이에스알 가부시끼가이샤
- 当前专利权人： 제이에스알 가부시끼가이샤
- 当前专利权人地址： *-*-*, Higashi-Shinbashi, Minato-ku, Tokyo, Japan
- 代理人： 장수길; 김성완; 이석재
- 优先权： JPJP-P-2012-046577 2012-03-02
- 主分类号： C23C30/00
- IPC分类号： C23C30/00 ; C01F7/02 ; C23C26/00
摘要：
PURPOSE: An aluminum containing film forming composite and a forming method thereof are provided to obtain an aluminum oxide film and an aluminum nitride film which have a higher purity than the conventional aluminum oxide film and aluminum nitride film. CONSTITUTION: A forming method of an aluminum containing film comprises the following steps. A coating layer is formed by coating an aluminum containing film formation composite, which is written in claim 1, on a gas. A film which contains carbon and aluminum is formed by heating the coating layer with one treatment which is selected from a group comprising electron irradiation, UV irradiation, and plasma. An oxide aluminum film is formed by performing hydrothermal treatment on the film which is obtained from the film forming process. The gas has the surface which is coated with a film containing aluminum or a transition metal.
摘要（中）：
目的：提供含铝成膜复合物及其形成方法，以获得纯度比常规氧化铝膜和氮化铝膜高的氧化铝膜和氮化铝膜。 构成：含铝膜的成形方法包括以下步骤。 根据权利要求1所述的涂覆含铝成膜复合体的气体，形成涂层。 含有碳和铝的薄膜是通过加热涂层而形成的，该处理选自电子照射，UV照射和等离子体。 通过对从成膜工艺获得的膜进行水热处理来形成氧化铝膜。 该气体具有涂覆有含有铝或过渡金属的膜的表面。