基本信息:
- 专利标题: 유기-무기 복합체 및 이로부터 제조된 나노임프린트용 스탬프
- 专利标题(英):Organic-inorganic hybrid material and stamp for nanoimprint manufactured from the same
- 专利标题(中):有机无机混合材料和印花从其制造的纳米薄膜
- 申请号:KR1020100083706 申请日:2010-08-27
- 公开(公告)号:KR1020120020012A 公开(公告)日:2012-03-07
- 发明人: 이두현 , 이병규 , 고웅
- 申请人: 삼성전자주식회사
- 申请人地址: ***, Samsung-ro, Yeongtong-gu, Suwon-si, Gyeonggi-do, Republic of Korea
- 专利权人: 삼성전자주식회사
- 当前专利权人: 삼성전자주식회사
- 当前专利权人地址: ***, Samsung-ro, Yeongtong-gu, Suwon-si, Gyeonggi-do, Republic of Korea
- 代理人: 리앤목특허법인
- 主分类号: C08G83/00
- IPC分类号: C08G83/00 ; C08G77/04 ; C01B33/113 ; B29C59/02
摘要:
PURPOSE: An organic-inorganic composite is provide to have high elasticity, self-release ability, and relatively low viscosity, thereby manufacturing a stamp for nanoimprint with micro patterns having excellent physical properties. CONSTITUTION: An organic-inorganic composite comprises backbone material, release material, and a photo initiator. The backbone material consists of inorganic material. At least one of the release material and the photoinitiator consists of organic material. The inorganic material of the backbone material is a compound containing at least one selected from a group consisting of Si, In, Zn, Al and Ti. A stamp for nanoimprint(S1) comprises a micro unevenness part(20a) formed of the organic-inorganic composite, and a support plate(200) supporting the micro unevenness part.
摘要(中):
目的:提供有机 - 无机复合材料具有高弹性,自释放能力和相对低的粘度,从而制造具有优异物理性能的微图案的纳米压印印模。 构成:有机 - 无机复合材料包括骨架材料,剥离材料和光引发剂。 骨架材料由无机材料组成。 释放材料和光引发剂中的至少一种由有机材料组成。 骨架材料的无机材料是含有选自Si,In,Zn,Al和Ti中的至少一种的化合物。 纳米压印印模(S1)包括由有机 - 无机复合材料形成的微不平坦部分(20a)和支撑微不平坦部分的支撑板(200)。
信息查询:
EspacenetIPC结构图谱:
C | 化学;冶金 |
--C08 | 有机高分子化合物;其制备或化学加工;以其为基料的组合物 |
----C08G | 用碳—碳不饱和键以外的反应得到的高分子化合物 |
------C08G83/00 | 在C08G2/00到C08G81/00组中不包含的高分子化合物 |