基本信息:
- 专利标题: 금속 회수방법, 금속 회수장치, 배기계 및 이것을 이용한 성막장치
- 专利标题(英):Metal recovery method, metal recovery apparatus, exhaust system, and filmforming device using same
- 专利标题(中):金属回收方法,金属回收装置,排气系统和使用其的成膜装置
- 申请号:KR1020117002995 申请日:2009-08-04
- 公开(公告)号:KR1020110038130A 公开(公告)日:2011-04-13
- 发明人: 하라마사미치 , 고미아츠시 , 하타노다츠오
- 申请人: 도쿄엘렉트론가부시키가이샤
- 申请人地址: *-* Akasaka *-chome, Minato-ku, Tokyo, Japan
- 专利权人: 도쿄엘렉트론가부시키가이샤
- 当前专利权人: 도쿄엘렉트론가부시키가이샤
- 当前专利权人地址: *-* Akasaka *-chome, Minato-ku, Tokyo, Japan
- 代理人: 제일특허법인
- 优先权: JPJP-P-2008-206474 2008-08-09
- 国际申请: PCT/JP2009/063810 2009-08-04
- 国际公布: WO2010018768 2010-02-18
- 主分类号: B01D53/62
- IPC分类号: B01D53/62 ; B01D53/64 ; C23C16/44 ; H01L21/28
Metal recovery unit 66 from the exhaust gas using a raw material gas composed of raw materials of an organic metal compound discharged from the treatment vessel 10 to form a thin film on the surface of the object to be processed, to recover the metal components and detoxicating the exhaust gas . Metal recovery apparatus to heat the exhaust gas passing through the collecting unit 80 and a collecting unit having a collecting member for attaching to the thermal decomposition of a raw material gas of the unreacted contained in the raw material gas of metal components which are contained in the exhaust gas provided with the harm-elimination unit 82 has a catalyst (100) for removal by oxidizing the organic components contained in the exhaust gas.
公开/授权文献:
- KR101291982B1 금속 회수방법, 금속 회수장치, 배기계 및 이것을 이용한 성막장치 公开/授权日:2013-08-09
信息查询:
EspacenetIPC结构图谱:
B01D53/34 | 组优先于B01D53/02至B01D53/32组。 |
--B01D53/38 | ..除去不明结构的组分 |
----B01D53/62 | ...碳氧化物 |