基本信息:
- 专利标题： 조정가능한 통공을 구비한 이온 소스
- 专利标题（英）：Ion source with adjustable aperture
- 专利标题（中）：离子源与可调节的孔
- 申请号：KR1020107026323 申请日：2009-04-23
- 公开(公告)号：KR1020110015573A 公开(公告)日：2011-02-16
- 发明人： 티거,다니엘 , 디버길리오,윌리엄 , 아이스너,에드워드 , 그라프,마이클
- 申请人： 액셀리스 테크놀러지스, 인크.
- 申请人地址： 미합중국 매사츄세츠 (우편번호: *****) 비벌리 체리 힐 드라이브 ***
- 专利权人： 액셀리스 테크놀러지스, 인크.
- 当前专利权人： 액셀리스 테크놀러지스, 인크.
- 当前专利权人地址： 미합중국 매사츄세츠 (우편번호: *****) 비벌리 체리 힐 드라이브 ***
- 代理人： 이시용; 정현주
- 优先权： US61/047,528 2008-04-24
- 国际申请： PCT/US2009/002521 2009-04-23
- 国际公布： WO2009131693 2009-10-29
- 主分类号： H01J37/08
- IPC分类号： H01J37/08 ; H01J37/317
Implanter system includes an ion source for use in the generation of the ion beam or stream. The ion source has an ion source chamber housing that at least partially defines the boundary of the ionization region for creating a high density concentration in the chamber housing. Ion extraction aperture of the desired characteristics (340, 342) covers an ionization region of the arc chamber. In one embodiment, the mobile ions extracted through the perforated plate 310 is movable relative to the housing in order to modify the ion beam profile. One embodiment is to move between at least a first and a second position for forming the different ion beam profiles comprising a barrel having a perforated plate at least a long hole (340, 342). A driving unit or an actuator that is coupled to the barrel through the perforated plate is to move the perforated plate between the first and second positions. Optional embodiment has the two movable plate portion that forms a boundary of the adjustable aperture.
公开/授权文献:
- KR101603196B1 조정가능한 통공을 구비한 이온 소스 公开/授权日：2016-03-14
信息查询:
EspacenetIPC结构图谱:
| H | 电学 |
| --H01 | 基本电气元件 |
| ----H01J | 放电管或放电灯 |
| ------H01J37/00 | 有把物质或材料引入使受到放电作用的结构的电子管,如为了对其检验或加工的 |
| --------H01J37/02 | .零部件 |
| ----------H01J37/04 | ..电极装置及与产生或控制放电的部件有关的装置，如电子光学装置，离子光学装置 |
| ------------H01J37/08 | ...离子源；离子枪 |