基本信息:
- 专利标题： 박막 태양전지 제조 장치
- 专利标题（英）：Apparatus for manufacturing thin film solar cell
- 专利标题（中）：薄膜太阳能电池制造设备
- 申请号：KR1020107022369 申请日：2009-06-04
- 公开(公告)号：KR1020100120717A 公开(公告)日：2010-11-16
- 发明人： 시미즈야스오 , 오가타히데유키 , 마츠모토고이치 , 노구치다카후미 , 와카모리죠지 , 오카야마사토히로 , 모리오카야와라 , 스기야마노리야스 , 시게타다카시 , 구리하라히로유키 , 하시모토마사노리 , 와카마츠사다츠구
- 申请人： 가부시키가이샤 아루박
- 申请人地址： 일본 가나가와껭 찌가사끼시 하기소노 ****반찌
- 专利权人： 가부시키가이샤 아루박
- 当前专利权人： 가부시키가이샤 아루박
- 当前专利权人地址： 일본 가나가와껭 찌가사끼시 하기소노 ****반찌
- 代理人： 리앤목특허법인
- 优先权： JPJP-P-2008-149935 2008-06-06
- 国际申请： PCT/JP2009/060252 2009-06-04
- 国际公布： WO2009148120 2009-12-10
- 主分类号： H01L31/18
- IPC分类号： H01L31/18 ; H01L31/0445
Thin-film solar cell manufacturing apparatus of the present invention, the film forming chamber for forming a film by the CVD method in the film forming surface of the substrate; The cathode and the voltage applied to the cathode is disposed on either unit, the counter in each of the cathode and also, the electrode unit having a pair of an anode disposed with the clearance and; And a mask covering peripheral edge of the substrate; Exhaust duct installed around the cathode unit; and having a film-forming space is formed between the cathode unit and the substrate installed at the anode; The mask and the exhaust passage is formed between the cathode unit; The exhaust duct and the film-forming space is connected through the exhaust passage; Is a deposit gas introduced to the film-forming space is exhausted from the exhaust duct through the exhaust passage.
公开/授权文献:
- KR101215089B1 박막 태양전지 제조 장치 公开/授权日：2012-12-24