基本信息:
- 专利标题: 반도체 재료로 방향성 고형화 블록을 제조하는 방법 및장치
- 专利标题(英):Method and device for producing oriented solidified blocks made of semi-conductor material
- 专利标题(中):用于生产半导体材料的定向固化块的方法和装置
- 申请号:KR1020077020137 申请日:2006-02-03
- 公开(公告)号:KR1020070102593A 公开(公告)日:2007-10-18
- 发明人: 휴고,프란츠
- 申请人: 알이씨 웨이퍼 피티이. 엘티디.
- 申请人地址: ** Tuas South Avenue **, ****** Singapore, Singapore
- 专利权人: 알이씨 웨이퍼 피티이. 엘티디.
- 当前专利权人: 알이씨 웨이퍼 피티이. 엘티디.
- 当前专利权人地址: ** Tuas South Avenue **, ****** Singapore, Singapore
- 代理人: 남상선
- 优先权: DE10 2005 005 1820 2005-02-03
- 国际申请: PCT/EP2006/000972 2006-02-03
- 国际公布: WO2006082085 2006-08-10
- 主分类号: H01L21/02
- IPC分类号: H01L21/02 ; H01L21/324
摘要:
The invention relates to a method for producing oriented solidified blocks made of semi-conductor material, in addition to a device. Said device comprises a crucible, wherein melt is received, and has an insulation which surrounds the crucible at least from the top and from the side and which is arranged at a distance therefrom at least above the crucible, and at least one heating device which is arranged above said crucible. The region inside the insulation above the crucible is divided by an intermediate cover in a process chamber and a heating chamber is arranged there above, wherein at least one heating element is arranged.
摘要(中):
本发明涉及一种用于生产由半导体材料制成的取向固化块的方法,以及装置。 所述装置包括坩埚,其中熔体被容纳,并且具有至少从顶部和从侧面围绕坩埚的绝缘体,并且至少在坩埚上方设置有一定距离的坩埚,以及至少一个加热装置, 布置在坩埚上方。 在坩埚上方的绝缘体内部的区域被处理室中的中间盖分隔,并且在上方布置有加热室,其中布置有至少一个加热元件。
公开/授权文献:
- KR101227563B1 반도체 재료로 방향성 고형화 블록을 제조하는 방법 및장치 公开/授权日:2013-01-29
信息查询:
EspacenetIPC结构图谱:
H | 电学 |
--H01 | 基本电气元件 |
----H01L | 半导体器件;其他类目未包含的电固体器件 |
------H01L21/00 | 专门适用于制造或处理半导体或固体器件或其部件的方法或设备 |
--------H01L21/02 | .半导体器件或其部件的制造或处理 |