基本信息:
- 专利标题: 수직구조 질화갈륨계 LED 소자의 제조방법
- 专利标题(英):Method for forming the vertically structured GaN type Light Emitting Diode device
- 专利标题(中):用于形成垂直结构的GaN型发光二极管器件的方法
- 申请号:KR1020050075159 申请日:2005-08-17
- 公开(公告)号:KR1020070020840A 公开(公告)日:2007-02-22
- 发明人: 오정탁 , 이재훈 , 최석범
- 申请人: 삼성전기주식회사
- 申请人地址: Maeyoung-Ro *** (Maetan-Dong), Youngtong-Gu, Suwon-Si, Gyeonggi-Do, Republic of Korea
- 专利权人: 삼성전기주식회사
- 当前专利权人: 삼성전기주식회사
- 当前专利权人地址: Maeyoung-Ro *** (Maetan-Dong), Youngtong-Gu, Suwon-Si, Gyeonggi-Do, Republic of Korea
- 代理人: 특허법인(유)화우
- 主分类号: H01L33/02
- IPC分类号: H01L33/02
수직구조, 질화갈륨계 LED, 소자분리, 절연패턴
The present invention relates to a method for manufacturing a vertical structure GaN-based LED element, in particular, and forming an insulating pattern defining a unit LED forming region of a predetermined size on a substrate, the substrate excluding the insulating pattern is formed area in forming a light emitting structure of the n-type structure with a gallium nitride-based semiconductor layer and the active layer and the p-type gallium nitride-based semiconductor layers are sequentially laminated, by removing the insulating pattern separating the light emitting structure into unit LED of a given size comprising the steps of, forming a p-type electrode, respectively on the separated light emitting structure, forming a structural support layer on the p-type electrode, exposing the n-type gallium nitride-based semiconductor layer by removing the substrate that step and to a method for manufacturing a vertical structure GaN-based LED element including forming each of the n-type electrode on the exposed n-type gallium nitride-based semiconductor layer. Vertical structure, a gallium nitride-based LED, an element isolation insulating pattern
公开/授权文献:
- KR100706951B1 수직구조 질화갈륨계 LED 소자의 제조방법 公开/授权日:2007-04-12