基本信息:
- 专利标题： 박막 트랜지스터 표시판 및 그 제조 방법
- 专利标题（英）：KR101909139B1 - Thin film transistor array panel and manufacturing method thereof
- 申请号：KR1020110010745 申请日：2011-02-07
- 公开(公告)号：KR101909139B1 公开(公告)日：2018-12-19
- 发明人： 우동원 , 박정민 , 박제형 , 김상갑 , 이정수 , 김지현
- 申请人： 삼성디스플레이 주식회사
- 申请人地址： 경기 용인시 기흥구 삼성로*(농서동)
- 专利权人： 삼성디스플레이 주식회사
- 当前专利权人： 삼성디스플레이 주식회사
- 当前专利权人地址： 경기 용인시 기흥구 삼성로*(농서동)
- 代理人： 팬코리아특허법인
- 主分类号： H01L29/786
- IPC分类号： H01L29/786 ; G02F1/136
The method of manufacturing a TFT array panel according to an embodiment of the present invention using a single exposure mask for the reference electrode and the gate conductor, and may be formed at the same time, to etch the reference electrode and the gate conductor, the bigwa aqueous etchant to be able to use the reference electrode layer and a first conductive layer serving as the bottom film with a gate conductor and etching a second conductive layer serving as an upper film of the gate conductor at the same time, or selectively etching only a single conductive layer, a second conductive layer and the first conductive layer than in the case of using the conventional hydrogen peroxide-based etching liquid to sequentially etched, and the manufacturing process can be simplified, and therefore, it is possible to reduce the manufacturing cost.
公开/授权文献:
- KR1020120090368A 박막 트랜지스터 표시판 및 그 제조 방법 公开/授权日：2012-08-17
信息查询:
EspacenetIPC结构图谱:
| H | 电学 |
| --H01 | 基本电气元件 |
| ----H01L | 半导体器件；其他类目未包含的电固体器件 |
| ------H01L29/00 | 专门适用于整流、放大、振荡或切换，并具有至少一个电位跃变势垒或表面势垒的半导体器件；具有至少一个电位跃变势垒或表面势垒，例如PN结耗尽层或载流子集结层的电容器或电阻器；半导体本体或其电极的零部件 |
| --------H01L29/02 | .按其半导体本体的特征区分的 |
| ----------H01L29/68 | ..只能通过对一个不通有待整流、放大或切换的电流的电极供给电流或施加电位方可进行控制的 |
| ------------H01L29/70 | ...双极器件 |
| --------------H01L29/762 | ....电荷转移器件 |
| ----------------H01L29/78 | .....由绝缘栅产生场效应的 |
| ------------------H01L29/786 | ......薄膜晶体管 |