基本信息:
- 专利标题: 분단 방법 및 분단 장치
- 专利标题(英):Dividing method and dividing apparatus
- 专利标题(中):分割方法和分割装置
- 申请号:KR1020130107786 申请日:2013-09-09
- 公开(公告)号:KR101792607B1 公开(公告)日:2017-11-01
- 发明人: 이노우에슈이치
- 申请人: 미쓰보시 다이야몬도 고교 가부시키가이샤
- 申请人地址: **-** Koroen, Settsu-city, Osaka, Japan
- 专利权人: 미쓰보시 다이야몬도 고교 가부시키가이샤
- 当前专利权人: 미쓰보시 다이야몬도 고교 가부시키가이샤
- 当前专利权人地址: **-** Koroen, Settsu-city, Osaka, Japan
- 代理人: 이철
- 优先权: JPJP-P-2012-284053 2012-12-27
- 主分类号: G02F1/13
- IPC分类号: G02F1/13 ; C03B33/02
(Tasks) that can efficiently dividing the laminate.
[MEANS FOR SOLVING PROBLEMS] on the first surface (11a) of the first substrate 11, the outer periphery of the first substrate 11 (外 周 緣; 11e); a first scribe with (11d 兩端) at both ends does not reach the to form a groove (11c). In addition, the forms a second scribe groove (12c) on the first surface (12a) of the second substrate (12). The first and second scribe groove (11c, 12c) for forming and then, by pressing the bonded substrate stack 10 from the first surface (11a) of the first substrate 11, second substrate 12, a second scribing the division along the groove (12c). Next, the second by pressing the bonded substrate stack 10 from the first surface (12a) of the substrate 12, and the division of the first substrate 11 along the first scribe groove (11c).
公开/授权文献:
- KR1020140085287A 분단 방법 및 분단 장치 公开/授权日:2014-07-07