基本信息:
- 专利标题： 포토리소그래피용 현상액 및 레지스트 패턴 형성 방법, 그리고 포토리소그래피용 현상액의 제조 방법 및 제조 장치
- 专利标题（英）：Developing solution for photolithography, method for forming resist pattern, and method and apparatus for producing developing solution for photolithography
- 申请号：KR1020100130417 申请日：2010-12-20
- 公开(公告)号：KR101763940B1 公开(公告)日：2017-08-01
- 发明人： 구마가이도모야 , 우에노나오히사 , 고시야마준
- 申请人： 도오꾜오까고오교 가부시끼가이샤
- 申请人地址： 일본국 가나가와껭 가와사끼시 나까하라구 나까마루꼬 ***반찌
- 专利权人： 도오꾜오까고오교 가부시끼가이샤
- 当前专利权人： 도오꾜오까고오교 가부시끼가이샤
- 当前专利权人地址： 일본국 가나가와껭 가와사끼시 나까하라구 나까마루꼬 ***반찌
- 代理人： 특허법인코리아나
- 优先权： JPJP-P-2009-296434 2009-12-25; JPJP-P-2009-296435 2009-12-25; JPJP-P-2010-031397 2010-02-16; JPJP-P-2010-240037 2010-10-26
- 主分类号： G03F7/32
- IPC分类号： G03F7/32 ; H01L21/027 ; G03F7/004 ; G03F7/42 ; G03F7/075
assignment
The first is to, tetrabutylammonium hydroxide (TBAH) is used as an alkali agent in the developing solution, and also to the problem is to provide a developing solution for the precipitation of the TBAH inhibiting photolithography. Secondly, is a challenge that according as the dilution to prepare a developing solution was concentrated developing solution containing TBAH, provides a production device used in the method of manufacturing a photolithographic developing solution for capable of suppressing the precipitation of TBAH, and such a method for producing do.
It means to resolve
The present invention, first as is, (A) tetrabutylammonium hydroxide and, (B1) an alcohol, (B2) a surfactant and (B3) is a photolithographic developing solution for containing at least one selected from the group consisting of clathrates . The present invention, as the second is characterized by keeping the liquid temperature of the liquid at the time of dilution of more than 27 ℃.
公开/授权文献:
信息查询:
EspacenetIPC结构图谱:
| G | 物理 |
| --G03 | 摄影术；电影术；利用了光波以外其他波的类似技术；电记录术；全息摄影术 |
| ----G03F | 图纹面的照相制版工艺，例如，印刷工艺、半导体器件的加工工艺；其所用材料；其所用原版；其所用专用设备 |
| ------G03F7/00 | 图纹面，例如，印刷表面的照相制版如光刻工艺；图纹面照相制版用的材料，如：含光致抗蚀剂的材料；图纹面照相制版的专用设备 |
| --------G03F7/16 | .涂层处理及其设备 |
| ----------G03F7/30 | ..用液体消除影像的 |
| ------------G03F7/32 | ...所用的液体成分，例如，显影剂 |