基本信息:
- 专利标题: 기판을 세정하기 위한 폼 발생기
- 专利标题(英):Generator for foam to clean substrate
- 专利标题(中):泡沫发电机清洁基板
- 申请号:KR1020117002774 申请日:2009-08-03
- 公开(公告)号:KR101652882B1 公开(公告)日:2016-08-31
- 发明人: 콜로덴코아놀드 , 후세인앤워 , 토마쉬그레고리에이 , 린청-위션
- 申请人: 램 리써치 코포레이션
- 申请人地址: 미국 ***** 캘리포니아주 프레몬트 쿠싱 파크웨이 ****
- 专利权人: 램 리써치 코포레이션
- 当前专利权人: 램 리써치 코포레이션
- 当前专利权人地址: 미국 ***** 캘리포니아주 프레몬트 쿠싱 파크웨이 ****
- 代理人: 오세일
- 优先权: US12/185,780 2008-08-04
- 国际申请: PCT/US2009/052609 2009-08-03
- 国际公布: WO2010017146 2010-02-11
- 主分类号: B08B3/00
- IPC分类号: B08B3/00 ; H01L21/304
In the exemplary embodiment, the device for generating a cleaning foam comprises a female housing and the male plug. The male plug includes an opening into the fluid flowing from the other components of the cleaning system. The male plug includes a pre-mixing chamber in which the gas is injected in order to accommodate and form a form a fluid from the opening. In the exemplary embodiment, the chamber is a hollow cylinder, the gas is injected into the cylinder through a tangential channel to the cylinder. Further, the male plug comprises a solid cylinder having a continuous spiral groove on the outer side of the solid cylinder. When the male plug is inserted in the female housing, it is a continuous spiral groove and the inner surface of the housing and forms a spiral flow channel that is the form is further mixed on a return path back to the cleaning system.
公开/授权文献:
- KR1020110052598A 기판을 세정하기 위한 폼 발생기 公开/授权日:2011-05-18
信息查询:
EspacenetIPC结构图谱:
B | 作业;运输 |
--B08 | 清洁 |
----B08B | 一般清洁;一般污垢的防除 |
------B08B3/00 | 使用液体或蒸气的清洁方法 |