基本信息:
- 专利标题: 습식 식각을 통한 복합패턴이 형성된 GaN계 발광 다이오드의 제조방법 및 이에 의한 복합패턴이 형성된 GaN계 발광 다이오드
- 专利标题(英):manufacturing method of complex pattern with GaN light emitting doide using wet etching and GaN light emitting doide thereby
- 专利标题(中):使用湿蚀刻和GAN发光的复合图案的发光方法与GAN发光的制造方法
- 申请号:KR1020140178692 申请日:2014-12-11
- 公开(公告)号:KR101598845B1 公开(公告)日:2016-03-03
- 发明人: 김창환 , 박형호 , 신현범
- 申请人: (재)한국나노기술원
- 申请人地址: ***-**, Iui-dong, Yeongtong-gu, Suwon-si, Gyeonggi-do, Rep. of Korea
- 专利权人: (재)한국나노기술원
- 当前专利权人: (재)한국나노기술원
- 当前专利权人地址: ***-**, Iui-dong, Yeongtong-gu, Suwon-si, Gyeonggi-do, Rep. of Korea
- 代理人: 이준성
- 主分类号: H01L33/00
- IPC分类号: H01L33/00 ; H01L21/306 ; H01L21/027
The present invention relates to a light emitting diode using the manufacturing method of the composite pattern through a wet etching process and this, in the manufacturing method of the light emitting diode, comprising: forming a p-type electrode on a substrate, p on the p-type electrode type GaN forming a compound semiconductor layer, and forming a GaN-based active layer, which generates the electrons and holes in the p-type GaN-based semiconductor layer to emit light, an n-type GaN-based semiconductor layer on the GaN-based active layer an upper layer forming, in correspondence to the shape of the first pattern on the n-type GaN-based semiconductor layer, forming a photoresist pattern to expose a partial region of the n-type GaN-based semiconductor layer, the exposed n-type forming a buffer layer on the GaN-based semiconductor layer, the method comprising: removing the photoresist pattern to form a mask pattern layer made of a buffer layer, the shape of the primary pattern advances a wet etching to the mask pattern layer as a mask. corresponding to that obtained by forming a n-type electrode on the step and the n-type GaN-based semiconductor layer, some areas on which the composite pattern is formed to form the second pattern is a composite of complex patterns in the n-type GaN-based semiconductor layer and a wet method of producing a GaN-based light emitting diode having a complex pattern by etching and thus the GaN-based light emitting diode made by featuring a technical base. Therefore, by by producing more than one compound of complex patterns in the normal photolithography process and a wet etching process, it is possible to manufacture an excellent light extraction structure relative to the light extracting structure formed of a single pattern or a surface roughness in a very simple process, the light emitting It has the advantage that it can easily be applied widely in the field of diode.