基本信息:
- 专利标题： 분할 타겟 펄스 레이저 증착 장치 및 이를 이용한 초박막 다층구조 증착 방법
- 专利标题（英）：Pulsed laser deposition apparatus with separated target and deposition method for multilayer thin film using of the same
- 专利标题（中）：具有分离靶的脉冲激光沉积设备和使用其的多层薄膜的沉积方法
- 申请号：KR1020120132942 申请日：2012-11-22
- 公开(公告)号：KR101502449B1 公开(公告)日：2015-03-13
- 发明人： 손지원 , 박정훈 , 윤경중 , 이해원 , 제해준 , 김병국 , 이종호
- 申请人： 한국과학기술연구원
- 申请人地址： 서울특별시 성북구 화랑로**길 * (하월곡동)
- 专利权人： 한국과학기술연구원
- 当前专利权人： 한국과학기술연구원
- 当前专利权人地址： 서울특별시 성북구 화랑로**길 * (하월곡동)
- 代理人： 특허법인충현
- 主分类号： C23C14/28
- IPC分类号： C23C14/28
The present invention, by decomposing the vapor deposition material by irradiating the laser to the target and the target part which relates to a pulsed laser deposition apparatus, the substrate and the deposited material is located a chamber, located within the chamber for supporting and rotating the deposition material , it includes a laser generator for depositing a thin film on a substrate from the decomposed vapor deposition material, the target, but not at least two deposited materials, and having a physical partition surface of the deposited material, the laser according to the rotation of the target and it is characterized in that the deposited material replacement to check, not only do implement the ultra-thin film multilayer structure of a constant period with great precision with minimum effort in accordance with the present invention, a method of applying them is very simple.
公开/授权文献:
- KR1020140065901A 분할 타겟 펄스 레이저 증착 장치 및 이를 이용한 초박막 다층구조 증착 방법 公开/授权日：2014-05-30