基本信息:
- 专利标题： 덕트 무게 실시간 모니터링 시스템
- 专利标题（英）：Duct Weighing Monitoring System
- 专利标题（中）：道格称重监控系统
- 申请号：KR1020140164832 申请日：2014-11-24
- 公开(公告)号：KR101486015B1 公开(公告)日：2015-01-27
- 发明人： 정명관 , 우명주 , 정은영 , 홍경모 , 김정진
- 申请人： 삼성물산 주식회사 , 주식회사 우진아이엔에스
- 申请人地址： **, Seocho-daero **-gil, Seocho-gu, Seoul, (***-***), Republic of Korea
- 专利权人： 삼성물산 주식회사,주식회사 우진아이엔에스
- 当前专利权人： 삼성물산 주식회사,주식회사 우진아이엔에스
- 当前专利权人地址： **, Seocho-daero **-gil, Seocho-gu, Seoul, (***-***), Republic of Korea
- 代理人： 박요창
- 主分类号： H01L21/66
- IPC分类号： H01L21/66 ; G01G19/00
The present invention relates to a duct monitoring system to enable the quantitative detection and the detection result of remote and immediately monitor the dust portion that the dust to be the exhaust of the duct via which the exhaust of dust generated in the semiconductor manufacturing process, the cumulative will be. This invention ducts monitoring system first to that sent to the external cycle is set to the installed on the sub-duct and the main duct that the movement of dust generated during a semiconductor manufacturing process to measure and weigh the dust weight in weight data N weighing sensor (110, 120, 130: 100); The repeater (200) for relaying the data transmitted from the first to the N-th weighing sensor (110, 120, 130) to the server that manages the dust; And relaying the first on the repeater 200 1 to according to the dust weight data from the N-th weighing sensor (110, 120, 130) stacked on the weight measuring sensor unit 100, a sub-duct and the main duct is installed monitoring the weight of dust information in real time, and the duct monitoring server 300 to send to the administrator mobile terminal (400); characterized by a composed, including.
信息查询:
EspacenetIPC结构图谱:
| H | 电学 |
| --H01 | 基本电气元件 |
| ----H01L | 半导体器件；其他类目未包含的电固体器件 |
| ------H01L21/00 | 专门适用于制造或处理半导体或固体器件或其部件的方法或设备 |
| --------H01L21/66 | .在制造或处理过程中的测试或测量 |