基本信息:
- 专利标题: 고 해상도를 갖는 열 복사 탐지 장치 및 상기 장치 제조 방법
- 专利标题(英):Device for detecting heat radiation with high resolution and method for the production thereof
- 专利标题(中):用于检测高分辨率的热辐射的装置及其生产方法
- 申请号:KR1020107009339 申请日:2008-09-29
- 公开(公告)号:KR101479915B1 公开(公告)日:2015-01-07
- 发明人: 기베러,카르스텐 , 레티그,우베 , 슈라이터,마티아스
- 申请人: 파이레오스 엘티디.
- 申请人地址: The Kings Buildings, Scottish Microelectronics Centre, West Mains Road, Edinburgh EH* *JF, United Kingdom
- 专利权人: 파이레오스 엘티디.
- 当前专利权人: 파이레오스 엘티디.
- 当前专利权人地址: The Kings Buildings, Scottish Microelectronics Centre, West Mains Road, Edinburgh EH* *JF, United Kingdom
- 代理人: 특허법인 남앤드남
- 优先权: DE10 2007 046 4519 2007-09-28
- 国际申请: PCT/EP2008/008280 2008-09-29
- 国际公布: WO2009043571 2009-04-09
- 主分类号: G01J5/10
- IPC分类号: G01J5/10 ; H01L27/16 ; H01L31/101 ; G01J5/34
The present invention includes the membrane and more than one detector element, the membrane and the detector elements are set respectively to convert into an electric signal the thermal radiation, being placed side by side to each other mounted on the membrane, the side of the membrane facing towards the detector element and / or one or more heat dissipating path is provided on the side of the membrane facing the side farther from the detector elements, so that the heat dissipation path may be using a divergent path heat the heat the emitted from the detector elements, It is connected with the detector elements in the thermal conductivity type through the membrane, jimyeo shortening the response time of the detector elements accordingly, one or more thermal barrier that the membrane has a lower thermal conductivity than the membrane that extends between the detector elements are provided to be integrated into, the thermal conduction in the membrane to the other detector elements from one detector element is prevented by the thermal barrier; Thus relates to thermal radiation detection apparatus of the cross-talk is lowered detector element.
公开/授权文献:
- KR1020100080604A 고 해상도를 갖는 열 복사 탐지 장치 및 상기 장치 제조 방법 公开/授权日:2010-07-09