The distortion removal apparatus and method is disclosed. Described distortion elimination apparatus is a scanning probe microscope as an apparatus for detecting the distortions present in the (SPM Scanning Probe Microscope), the one with a Z scanner in accordance with the above scan line data values obtained by scanning a sample (sample data values) provided in the sample receiving input data values, said sample data values distorted by the declination of the sample present in the (declination distortion) and distorted (hysteresis distortion) due to the data values, the hysteresis (hysteresis) characteristic of the Z scanner corresponding to the corresponding data values and the distortion due to creep (creep) characteristic of the scanner Z (creep strain) input unit for receiving at least one of the data values corresponding to; And distortion in said sample data values ​​by removing at least one of the declination distortion and corresponding data values, the hysteresis distortion and corresponding data values ​​and the creep strain and corresponding data values ​​eliminate the distortion present in said sample data values remove it includes parts.