基本信息:
- 专利标题： 하전 입자선 장치
- 专利标题（英）：Charged particle radiation device
- 专利标题（中）：充电颗粒辐射装置
- 申请号：KR1020127033316 申请日：2010-01-20
- 公开(公告)号：KR101396676B1 公开(公告)日：2014-05-16
- 发明人： 가타네,준이찌 , 이또,스께히로
- 申请人： 가부시키가이샤 히다치 하이테크놀로지즈
- 申请人地址： **-**, NISHISHINBASHI *-CHOME, MINATO-KU, TOKYO JAPAN
- 专利权人： 가부시키가이샤 히다치 하이테크놀로지즈
- 当前专利权人： 가부시키가이샤 히다치 하이테크놀로지즈
- 当前专利权人地址： **-**, NISHISHINBASHI *-CHOME, MINATO-KU, TOKYO JAPAN
- 代理人： 장수길; 이만금; 박충범; 이중희
- 优先权： JPJP-P-2009-025495 2009-02-06
- 国际申请： PCT/JP2010/000279 2010-01-20
- 国际公布： WO2010089958 2010-08-12
- 主分类号： H01J37/22
- IPC分类号： H01J37/22 ; H01J37/244 ; H01J37/28
Scanning the charged particle beam device according to the present invention, the sample chamber (8) and, a detector, and the detector when the sample chamber is controlled to a low vacuum (1㎩~3000㎩), light emission caused by gas scintillation ion current (11, 13) with the image information obtained by the cascade amplification of the function of the electrons and the gas molecules to detect the light to the visible light region from at least the vacuum ultraviolet region of the light 17 with the image information obtained by the and it combines the function of detecting. As a result, it is possible to realize a device which may correspond to the observation of different samples, and also, by devising an optimum configuration of the detection unit, by applying an added value in the resulting image, to provide the observation image to the user in various fields It could have been so. Further, by the detector enables the detector in combination with a high vacuum, it was to provide a wider seat width, regardless of the vacuum mode the image.
公开/授权文献:
- KR1020130014609A 하전 입자선 장치 公开/授权日：2013-02-07