基本信息:
- 专利标题： 프로브 장치 및 프로브 장치의 프로브 카드 장착 방법
- 专利标题（英）：Probe apparatus and providing method for probe card of probe apparatus
- 专利标题（中）：探针装置的探针装置和探针方法
- 申请号：KR1020130024513 申请日：2013-03-07
- 公开(公告)号：KR101374529B1 公开(公告)日：2014-03-13
- 发明人： 아키야마슈지 , 아메미야히로시
- 申请人： 도쿄엘렉트론가부시키가이샤
- 申请人地址： *-* Akasaka *-chome, Minato-ku, Tokyo, Japan
- 专利权人： 도쿄엘렉트론가부시키가이샤
- 当前专利权人： 도쿄엘렉트론가부시키가이샤
- 当前专利权人地址： *-* Akasaka *-chome, Minato-ku, Tokyo, Japan
- 代理人： 특허법인엠에이피에스
- 优先权： JPJP-P-2012-057236 2012-03-14
- 主分类号： H01L21/66
- IPC分类号： H01L21/66 ; G01R1/073
Can be performed certainly passed on mounting and carrying the probe card, the probe card provides a mounting method of a probe apparatus and a probe apparatus which can suppress the occurrence of damage to the probe card. The card clamp mechanism, and a wafer chuck and, when the position Cho Jeongyong mark is installed in the tray, and a possible tray supporting the tray support to the mechanism and a movement for importing a camera, and a tray to tray transfer and support mechanism position mechanism and the moving mechanism in the position Cho Jeongyong mark on the tray placed in the transfer position by the image pick-up by a camera and detects the position, when the position of the position Cho Jeongyong mark is within a predetermined range, the transmission of the probe card of the tray holding mechanism from moving mechanism performing, in the case where there in addition to a predetermined range, and a control means for stopping the transmission of the probe card.
公开/授权文献:
- KR1020130105397A 프로브 장치 및 프로브 장치의 프로브 카드 장착 방법 公开/授权日：2013-09-25
信息查询:
EspacenetIPC结构图谱:
| H | 电学 |
| --H01 | 基本电气元件 |
| ----H01L | 半导体器件；其他类目未包含的电固体器件 |
| ------H01L21/00 | 专门适用于制造或处理半导体或固体器件或其部件的方法或设备 |
| --------H01L21/66 | .在制造或处理过程中的测试或测量 |