基本信息:
- 专利标题： 가변 개구를 이용하는 것에 의한 주입 방법 및 주입기
- 专利标题（英）：Implant method and implanter by using a variable aperture
- 专利标题（中）：通过使用可变孔径进行植入法和注入机
- 申请号：KR1020130032357 申请日：2013-03-26
- 公开(公告)号：KR101364304B1 公开(公告)日：2014-02-18
- 发明人： 완지민 , 폴락존디. , 배리앤돈 , 젠코-추안
- 申请人： 어드밴스드 이온 빔 테크놀로지 인크.
- 申请人地址： *F, No.**, CREATION ROAD *, SCIENCE PARK, HSIN-CHU ***, TAIWAN R.O.C.
- 专利权人： 어드밴스드 이온 빔 테크놀로지 인크.
- 当前专利权人： 어드밴스드 이온 빔 테크놀로지 인크.
- 当前专利权人地址： *F, No.**, CREATION ROAD *, SCIENCE PARK, HSIN-CHU ***, TAIWAN R.O.C.
- 代理人： 김경희
- 优先权： US12/748,877 2010-03-29
- 主分类号： H01J37/317
- IPC分类号： H01J37/317 ; H01L21/265
Variable aperture within the aperture device to form an ion beam before the ion beam is being injected to the substrate, used in particular in order to ultimately form the ion beam disposed in the right front of the substrate. Thus, different portions of the substrate or a different substrate may be respectively injected by the ion beams of different shapes without having to go back to using a plurality of fixing openings, or every time the ion beam. That is, the high cost (using a fixed number of opening devices) can also complex operation can be achieved by the respective different injection tailored ion beam (without falling back to the ion beam each time) with no. In addition, the control of the variable aperture is faster as compared to the store be a beam tune process for obtaining a certain ion beam for injecting acceleration because it can be simply achieved by the mechanical work back a plurality of fixing openings and / or ion beam each time .
公开/授权文献:
- KR1020130038327A 가변 개구를 이용하는 것에 의한 주입 방법 및 주입기 公开/授权日：2013-04-17
信息查询:
EspacenetIPC结构图谱:
| H | 电学 |
| --H01 | 基本电气元件 |
| ----H01J | 放电管或放电灯 |
| ------H01J37/00 | 有把物质或材料引入使受到放电作用的结构的电子管,如为了对其检验或加工的 |
| --------H01J37/02 | .零部件 |
| ----------H01J37/317 | ..用于改变物体的特性或在其上加上薄层的，如离子注入 |