基本信息:
- 专利标题： 평판 표시장치의 제조 장비와 그 제조 방법
- 专利标题（英）：Apparatus manufacturing for flat panel display device and mathod for manufacturing the same
- 专利标题（中）：用于平板显示设备的设备制造和用于制造其的机器
- 申请号：KR1020100112694 申请日：2010-11-12
- 公开(公告)号：KR101351419B1 公开(公告)日：2014-01-15
- 发明人： 김용일 , 방정호 , 홍기상
- 申请人： 엘지디스플레이 주식회사
- 申请人地址： 서울특별시 영등포구 여의대로 ***(여의도동)
- 专利权人： 엘지디스플레이 주식회사
- 当前专利权人： 엘지디스플레이 주식회사
- 当前专利权人地址： 서울특별시 영등포구 여의대로 ***(여의도동)
- 代理人： 김용인; 박영복
- 主分类号： G02F1/13
- IPC分类号： G02F1/13 ; H01L51/56
The invention manufacturing equipment and its manufacturing method of the flat panel display device to be formed in a precise thickness and width than while reducing the failure rate in forming transparent thin film (Transparent Thin film) or the pattern (Pattern) of the manufacturing process of the flat panel display device It relates to a loading / unloading unit for loading or unloading the substrate from the outside; Coating line for forming a transparent conductive metal layer on the substrate; Blackened blackened line to the transparent electrically conductive metal layer; The exposure lines for which exposure to the blackening the metal layer; Phenomenon to take the blackening of the metal layer provides an exposed substrate performing a developing process line; And it characterized in that the annealing process in an annealing line provided to restore a pattern of blackening the metal layer is patterned by the developing process to the transparency metal pattern.
公开/授权文献:
- KR1020120051313A 평판 표시장치의 제조 장비와 그 제조 방법 公开/授权日：2012-05-22