基本信息:
- 专利标题： 도포 장치 및 도포 방법
- 专利标题（英）：Coating apparatus and coating method
- 专利标题（中）：涂装和涂装方法
- 申请号：KR1020100019496 申请日：2010-03-04
- 公开(公告)号：KR101290007B1 公开(公告)日：2013-07-30
- 发明人： 다카무라유키히로 , 마스이치미키오 , 마츠카츠요시 , 가와고에마사후미 , 사가라수이치 , 이토류스케 , 오에무네아키
- 申请人： 가부시키가이샤 스크린 홀딩스
- 申请人地址： Tenjinkita-machi *-*, Teranouchi-agaru *-chome, Horikawa-dori, Kamigyo-ku, Kyoto-shi, Kyoto ***-****, Japan
- 专利权人： 가부시키가이샤 스크린 홀딩스
- 当前专利权人： 가부시키가이샤 스크린 홀딩스
- 当前专利权人地址： Tenjinkita-machi *-*, Teranouchi-agaru *-chome, Horikawa-dori, Kamigyo-ku, Kyoto-shi, Kyoto ***-****, Japan
- 代理人： 한양특허법인
- 优先权： JPJP-P-2009-071945 2009-03-24
- 主分类号： B05C5/02
- IPC分类号： B05C5/02 ; B05C11/10 ; H01L21/027 ; G03F7/16
Challenge is, while using a non-contact support device, to provide an apparatus for coating by a nozzle printing method, a stable effective. A coating device for applying a fluid material to a substrate as its solution, nozzle, liquid-receiving portions, is provided with a injury supporting unit, the nozzle movement mechanism, the substrate transfer mechanism, the control, and the injured supporting unit and the liquid-receiving portion arranged, the nozzle is such that directly under the said nozzle support injury if this forms a liquid bridge with respect to the to be coated substrate unit, or any of the nozzle of the above-described form a range outside of the liquid pillar to be coated substrate and the liquid receiving part if one is directly under the nozzle is carried out so that, there is provided a coating device.
公开/授权文献:
- KR1020100106910A 도포 장치 및 도포 방법 公开/授权日：2010-10-04
信息查询:
EspacenetIPC结构图谱:
| B | 作业；运输 |
| --B05 | 一般喷射或雾化；对表面涂覆液体或其他流体的一般方法 |
| ----B05C | 一般对表面涂布液体或其他流体的装置 |
| ------B05C5/00 | 将液体或其他流体物质喷射，灌注或让其流到工件表面的装置 |
| --------B05C5/02 | .液体从与工件接触的或几乎接触的一个出口中出来 |