基本信息:
- 专利标题： ＭＥＭＳ 공진기
- 专利标题（英）：MEMS resonator
- 专利标题（中）：MEMS谐振器
- 申请号：KR1020110045276 申请日：2011-05-13
- 公开(公告)号：KR101270136B1 公开(公告)日：2013-06-04
- 发明人： 김정무 , 김용권 , 박현우 , 송진우 , 정형균 , 김도형
- 申请人： (주)마이크로인피니티 , 전북대학교산학협력단 , 서울대학교산학협력단
- 申请人地址： (Iui-dong), ***, Gwanggyo-ro, Yeongtong-gu Suwon-si, Gyeonggi-do, Korea
- 专利权人： (주)마이크로인피니티,전북대학교산학협력단,서울대학교산학협력단
- 当前专利权人： (주)마이크로인피니티,전북대학교산학협력단,서울대학교산학협력단
- 当前专利权人地址： (Iui-dong), ***, Gwanggyo-ro, Yeongtong-gu Suwon-si, Gyeonggi-do, Korea
- 代理人： 특허법인가산
- 主分类号： H03H9/24
- IPC分类号： H03H9/24 ; H01P7/00 ; B81B7/02
The MEMS resonator to significantly reduce the feed-through capacitance that causes the while maintaining the advantages of the differential drive noise is provided. MEMS resonator according to the present invention is located in the resonator, wherein a substrate positioned on the substrate, the substrate, comprising: a first stator and a second stator which is located at both sides of the oscillator, by contact with the vibrator, the first stator the first drive and includes an electrode, a first sensing electrode, the second stator has a second drive electrode, and a second detection electrode, the first and second driving electrodes are respectively the first and second drive receiving service signals, wherein the first and second sensing electrode may output an output signal based on the first and second drive signals.
公开/授权文献:
- KR1020120127051A ＭＥＭＳ 공진기 公开/授权日：2012-11-21
信息查询:
EspacenetIPC结构图谱:
| H | 电学 |
| --H03 | 基本电子电路 |
| ----H03H | 阻抗网络，例如谐振电路；谐振器 |
| ------H03H9/00 | 包括机电或电声元件的网络，如谐振电路 |
| --------H03H9/24 | .不用压电、电致伸缩或磁致伸缩材料的谐振器的结构特点 |