基本信息:
- 专利标题: 流体供給装置
- 专利标题(英):Fluid supply device
- 申请号:JP2012549832 申请日:2011-12-20
- 公开(公告)号:JPWO2012086646A1 公开(公告)日:2014-05-22
- 发明人: 平田 篤彦 , 篤彦 平田 , 神谷 岳 , 岳 神谷 , 宏之 横井 , 宏之 横井
- 申请人: 株式会社村田製作所
- 专利权人: 株式会社村田製作所
- 当前专利权人: 株式会社村田製作所
- 优先权: JP2010287260 2010-12-24
- 主分类号: G05D7/01
- IPC分类号: G05D7/01 ; F16K7/17 ; F16K17/28 ; F16K31/126
Are possible supply stable regardless of changes in the surrounding environment, and can open and close the valve without using an active element, the forward flow obtaining a smooth fluid supply device.
Fluid supply source (2), a valve (3A), and differential pressure generating means (4), and pressurizing means (6), the fluid supply apparatus comprising a. Valve (3A) includes a housing (10), dividing the 該筺 body (10) inside the first valve chamber (11) and the second valve chamber (12), the pressure of the fluid acting on the front and back main surfaces the second opening provided with a displacement member which is displaced (20), a first opening provided in the first valve chamber (11) and (15), the first valve chamber (11) by ( 16), and a third opening provided in the second valve chamber (12) and (17), the. Thus, the changes in the surrounding environment, the pressure in the discharge side or the suction side of the apparatus even if fluctuation, change in flow rate is suppressed.
公开/授权文献:
- JP5522270B2 Fluid supply device 公开/授权日:2014-06-18