The present invention aims to provide a functional device embedded substrate can suppress the occurrence of possible and warp thinner.
The present invention includes at least a functional element having an electrode terminal, a functional device embedded substrate comprising a covering insulating layer, a coating at least the electrode terminals and side surfaces of the functional element,
Inside the cover insulating layer a periphery of the functional element has a first columnar structure made of a material having a thermal expansion coefficient between the insulating cover layer and the functional element,
Columnar structures wherein the first functional element built, wherein a shortest distance from the side face of the functional element to the side surface of the first columnar structure is disposed to a thickness less than the position of the functional element it is a substrate.