基本信息:
- 专利标题: LASER WITH EXTREMELY NARROW BAND USING UNSTABLE RESONANCE CAVITY
- 申请号:JP18488198 申请日:1998-06-30
- 公开(公告)号:JPH1174601A 公开(公告)日:1999-03-16
- 发明人: ERSHOV ALEXANDER I
- 申请人: CYMER INC
- 专利权人: CYMER INC
- 当前专利权人: CYMER INC
- 优先权: US88671597 1997-07-01
- 主分类号: G02B5/18
- IPC分类号: G02B5/18 ; G03F7/20 ; H01S3/08 ; H01S3/1055 ; H01S3/13 ; H01S3/137 ; H01S3/225
摘要:
PROBLEM TO BE SOLVED: To obtain a laser with narrow band operating over a long term while improving the wavelength stability by combining a beam expander with a line narrowing system for correcting the wave front distortion caused by a tubular mirror. SOLUTION: An output coupler comprises a partial reflection tubular convex mirror 68 and the output from a gain medium 65 is made narrow in a line narrowing module. The line narrowing module comprises a prism beam expander 70 for enlarging a beam in one direction perpendicular to the axis of the tubular mirror 68, a turning total reflector 72, and a lattice 74. The lattice 74 has an adjustable curve and adjusted to correct a wave front distortion caused by the tubular mirror 68. The lattice is curved by a compression spring, and a threaded micrometer push bolt 76 for applying a compressive force to the inside of legs 78, 80 extending from the opposite ends of the lattice 74. Apertures 82, 84 limit the cross-sectional dimensions of a beam.
公开/授权文献:
- JP3419686B2 公开/授权日:2003-06-23