PURPOSE:To evaluate minutely the tip shape of a probe fabricated sharply by letting the measured probe scan on the level difference on a solid surface formed with a specified accuracy as a probe of scanning type probe microscope. CONSTITUTION:A level difference for evaluating the tip shape of a probe by using a scanning type probe microscope is formed with a photo-resography technique by using, for example, Si wafer (100) surface. This is a level difference having the shape drawn with a convex line 12. The cross section of the level difference is observed with a high resolution scanning type electronmicroscope to confirm that the level difference is exactly formed. If the level difference is observed by attaching probes 13, 14 having different radii of curveture of the probe tips to the scanning type probe microscope, different observation images are obtained for the same level difference shape. When scanned by a probe 14 with large radius of curveture, wider hatched part 18 than the actual one is observed. Te two parts of the hatched part 18 show the shape of the left and the right of the probe 14. By systhesizing them, the shape of the probe 14 is obtained.