基本信息:
- 专利标题: POSITIONING DEVICE
- 申请号:JP22776591 申请日:1991-09-09
- 公开(公告)号:JPH0566108A 公开(公告)日:1993-03-19
- 发明人: TAKEUCHI HIROYUKI , YAMAMOTO MASAKI , SUGIYAMA YOSHIYUKI , SATO TAKEO , AOKI SHINICHIRO
- 申请人: MATSUSHITA ELECTRIC IND CO LTD
- 专利权人: MATSUSHITA ELECTRIC IND CO LTD
- 当前专利权人: MATSUSHITA ELECTRIC IND CO LTD
- 优先权: JP22776591 1991-09-09
- 主分类号: G01B11/00
- IPC分类号: G01B11/00 ; H01L21/027 ; H01L21/30
摘要:
PURPOSE:To highly precisely position a reticule and a wafer through a projecting optical system in a positioning device used in various exposing devices by correcting the convergence error in an alignment wavelength different from an exposing wavelength, and imaging a positioning mark image on the reticule onto the wafer through a correcting optical system and a lens. CONSTITUTION:A first positioning mark 5 provided on a first object 1 situated on the object surface of a projecting optical system, a second positioning mark 6 provided on a second object 2 situated on the image surface of the projecting optical system, and a light source 4 emitting a coherent alignment light of two frequencies having a wavelength different from an exposing wavelength are provided. A correcting optical system 7 for correcting the convergence error of the projecting optical system so as to perform a precise imaging onto the second object surface in conformation to a specified area where an interference fringe is formed on the first object, a spatial filtering optical system 13 for removing a speckle pattern from the light returned from the second positioning mark 6, and a light detecting means 15 for detecting a light beat signal from the light transmitted through the space filtering optical system are provided.
信息查询:
EspacenetIPC结构图谱:
G | 物理 |
--G01 | 测量;测试 |
----G01B | 长度、厚度或类似线性尺寸的计量;角度的计量;面积的计量;不规则的表面或轮廓的计量 |
------G01B11/00 | 以采用光学方法为特征的计量设备 |