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1. 发明专利

CA2467686A1 PIEZOELECTRIC BODY MANUFACTURING METHOD, PIEZOELECTRIC BODY,ULTRASONIC PROBE, ULTRASONIC DIAGNOSING DEVICE, AND NONDESTRUCTIVE INSPECTION DEVICE 未知
公开(公告)号：CA2467686A1
公开(公告)日：2003-05-30
申请号：CA2467686
申请日：2002-11-21
申请人： MATSUSHITA ELECTRIC IND CO LTD
发明人： SATO TOSHIHARU , AMEMIYA KIYOHIDE , SUGIYAMA YOSHIYUKI
IPC分类号： G01N29/24 , A61B8/00 , H04R17/00 , H04R31/00 , H01L41/08 , H01L41/22
摘要： A piezoelectric body manufacturing method for realizing a highly reliable ultrasonic diagnosis by using one or more piezoelectric bodies of a same sha pe accurately manufactured so as to provide a thickness distribution, the piezoelectric bodies, an ultrasonic probe, an ultrasonic diagnosing device, and a nondestructive inspection device, the method comprising a piezoelectri c precursor forming step for forming the mixture of piezoelectric material mad e of piezoelectric ceramics powder with binder dissolved in solvent in a sheet with a thickness of several ten microns to several hundred microns by a doct or blade method, piezoelectric precursor laminating steps (a) and (b) for laminating a sheet-like piezoelectric precursor (6) thus obtained, pressurizing steps (c) and (d) for molding piezoelectric precursor laminated bodies (7) thus obtained, and a baking step (e) for baking a pressurized piezoelectric precursor laminated body (7a) to a specified shape.

2. 发明公开

EP0928688A4 INK JET RECORDING HEAD AND METHOD OF MANUFACTURING THE SAME 失效
标题翻译：喷墨记录头和制造方法
公开(公告)号：EP0928688A4
公开(公告)日：2000-10-18
申请号：EP98929722
申请日：1998-06-26
申请人： MATSUSHITA ELECTRIC IND CO LTD
发明人： MIURA MASAYOSHI , TAKEKAWA MASAICHIRO , SUGIYAMA YOSHIYUKI , HASHIMOTO MASAHIKO , AMEMIYA KIYOHIDE
IPC分类号： B41J2/14 , B41J2/16 , B41J2/045 , B41J2/055
CPC分类号： B41J2/1623 , B41J2/14209 , B41J2/1609 , B41J2/1626 , B41J2/1632 , B41J2/1643 , B41J2002/14379
摘要： An ink jet recording head comprising a plurality of ink chambers (pressure chambers) (13) communicating with an ink supply source and arranged in predetermined directions, a plurality of nozzles (11a) communicating with relative ink chambers (13) and arranged in predetermined directions, and flat members (14, 15, 17, 18) provided among the ink chambers (13), having piezoelectric plate members capable of discharging ink from the ink chambers, and arranged in a laminated state in the directions of arrangement of the nozzles (11a). This structure can realize a multinozzle ink jet recording head having a highly dense nozzle arrangement.

3. 发明专利

DE69109220D1 未知
公开(公告)号：DE69109220D1
公开(公告)日：1995-06-01
申请号：DE69109220
申请日：1991-09-20
申请人： MATSUSHITA ELECTRIC IND CO LTD
发明人： TAKEUCHI HIROYUKI , YAMAMOTO MASAKI , SATO TAKEO , SUGIYAMA YOSHIYUKI , AOKI SHINICHIRO
IPC分类号： G03F9/00 , H01L21/68 , H01L21/00
摘要： A position signal producing apparatus, for an apparatus for project-printing a pattern on a reticle (1) onto a wafer 82) through a project lens system (4) with exposure light (8), for producing a position signal indicative of the position of the wafer is disclosed, wherein two different frequency components (f1, f2) of alignment light (10) whose frequencies are different from that of the exposure light are interfered with each other at a position alignment blank (5) to form interference fringes (19) having a given pitch. The interference fringes are projected onto a diffraction grating (6) through an achromatizing optical system (18) and the project lens system. Diffracted light returning from the diffraction grating (6) is received by a photodetector (24) which produces a light beat signal. A position deviation signal obtained by phase comparison of the light beat signal provides position alignment by controlling relative positions between the position alignment blank (5) and the diffraction grating (6). Two light beams of the two different frequency components split by a polarized beam splitter (12) are equalized in image converting condition, or image aspect, by a mirror (60), so that an accurate mixing of the two frequency components of light beams is performed at the position alignment blank.

4. 发明专利

DE69129925T2 未知
公开(公告)号：DE69129925T2
公开(公告)日：1999-03-18
申请号：DE69129925
申请日：1991-05-24
申请人： MATSUSHITA ELECTRIC IND CO LTD
发明人： AOKI SHINICHIRO , SATO TAKEO , YAMAMOTO MASAKI , TAKEUCHI HIROYUKI , ARAKI NOBUHIRO , SUGIYAMA YOSHIYUKI
IPC分类号： G03F9/00 , H01L21/027 , H01L21/30
摘要： A reticle/wafer alignment system provided with a laser beam source for emitting laser beams, a first optical system portion for a reticle/wafer alignment which consists of a first optical sub-system for receiving laser beams from the laser beam source and projecting the received laser beams onto alignment marks formed on a substrate and made up of diffraction gratings and a second optical sub-system for gathering laser beams diffracted by the alignment marks to form an image thereof, a photoelectric detection portion for performing a photoelectric conversion of the gathered laser beams, a position detecting portion for measuring the position of the substrate based on a signal outputted from the photoelectric detection portion, a second optical system portion for an image processing which consists of a third optical sub-system for illuminating the alignment marks and a fourth optical sub-system having a television camera for observing the image of the alignment marks, and an image processing portion for performing an image processing of video signals outputted from the television camera. The first and second optical system portions are made in such a manner to have a common part thereof. Thereby, an entire alignment system can be made to be compact. Consequently, a position measurement accuracy can be improved.

5. 发明专利

DE69014180D1 未知
公开(公告)号：DE69014180D1
公开(公告)日：1994-12-22
申请号：DE69014180
申请日：1990-09-12
申请人： MATSUSHITA ELECTRIC IND CO LTD
发明人： SATO TAKEO , YAMAMOTO MASAKI , AOKI SHINICHIRO , SUGIYAMA YOSHIYUKI , NAKANISHI YOSHITO , TAKEUCHI HIROYUKI
IPC分类号： G01M11/02 , G03F7/20
摘要： A first reticle is located at an object position of a lens to be evaluated. The first reticle is formed with a first diffraction grating. A stage supports the first reticle. A coherent light source illuminates a whole region of the first diffraction grating. A spatial filter blocks a 0-order component of diffraction light from the first diffraction grating. A second reticle is located at an image position of the lens and is formed with a second diffraction grating. A stage moves the second reticle within a projection range of the lens. Interference fringes are formed on the second reticle by re-diffraction by the lens. Moire fringes are caused by the second diffraction grating and the interference fringes. The moire fringes are observed.

6. 发明专利

DE3476132D1 ULTRASONIC PROBE HAVING DUAL-MOTION TRANSDUCER 未知
公开(公告)号：DE3476132D1
公开(公告)日：1989-02-16
申请号：DE3476132
申请日：1984-06-22
申请人： MATSUSHITA ELECTRIC IND CO LTD
发明人： SUGIYAMA YOSHIYUKI , AOKI SHINICHIRO , MORITA YASUYUKI
IPC分类号： G10K11/35 , G10K11/00 , A61B10/00
摘要： In a mechanically scanned ultrasonic probe, an ultrasonic transducer is swingably mounted on a drive shaft which is given a swinging transversal movement and a reciprocating longitudinal movement. The transducer emits an acoustic beam which is steered in a raster format in response to the swing and reciprocating motions. Echos returning from objects contain diagnostic data of a three-dimensional space. All the components are encased in a toothbrush-like housing having a head portion, an intermediate portion and a hand-grip portion. The dual motions are provided by a drive mechanism accommodated in the hand-grip portion and the transducer is accommodated in the head portion. The drive shaft extends through the intermediate portion.

7. 发明专利

DE69015717D1 未知
公开(公告)号：DE69015717D1
公开(公告)日：1995-02-16
申请号：DE69015717
申请日：1990-07-13
申请人： MATSUSHITA ELECTRIC IND CO LTD
发明人： YAMAMOTO MASAKI , SATO TAKEO , SUGIYAMA YOSHIYUKI , AOKI SHINICHIRO , TAKEUCHI HIROYUKI
IPC分类号： G03F9/00 , G01B11/00 , G03B41/00
摘要： A position signal producing apparatus, for an apparatus for project-printing a pattern on reticle onto an wafer through a project lens with ultraviolet light, for producing a position signal indicative of position of the wafer, comprises: a laser emitting two different frequency components polarized orthogonally with each other which are splitted by a polarizing beam splitter. The first and second components are reflected by first and second mirrors respectively to produce interference fringes at a given place being on an annular region within a circle defined by field angle of the project lens on the reticle through wave plates for circularly-polarizing. Another interference fringes is formed on a diffraction grating of the wafer in correspondence with the interference fringes through the project lens and a lens for achromatizing the project lens at wavelength of the components. Another interference fringes reflected by the diffraction grating is detected by a photodetector for producing the position signal. The interference fringes may formed on the wafer by another diffraction grating on the reticle illuminated by the first and second components in combination with polarizing elements provided between the reticle and the wafer in replace with the polarizing beam splitter and wave plates.

8. 发明专利

DE3778179D1 未知
公开(公告)号：DE3778179D1
公开(公告)日：1992-05-21
申请号：DE3778179
申请日：1987-01-30
申请人： MATSUSHITA ELECTRIC IND CO LTD
发明人： KIKUCHI KOH , MORITA YASUYUKI , SUGIYAMA YOSHIYUKI
IPC分类号： G10K11/35 , G10K11/00 , A61B8/00

9. 发明专利

DE10297480T5 未知
公开(公告)号：DE10297480T5
公开(公告)日：2005-02-24
申请号：DE10297480
申请日：2002-11-21
申请人： MATSUSHITA ELECTRIC IND CO LTD
发明人： SATO TOSHIHARU , AMEMIYA KIYOHIDE , SUGIYAMA YOSHIYUKI , ARIGA GUNICHIRO
IPC分类号： G01N29/24 , A61B8/00 , H04R17/00 , H04R31/00 , H01L41/22 , H01L41/08
摘要： Herein disclosed are a piezoelectric device, an ultrasonic probe, an ultrasonic diagnostic apparatus, a nondestructive testing device, and a method of producing one or more piezoelectric devices respectively having predetermined thickness distributions equal in shape to one another with high precision to realize an ultrasound diagnosis with high reliability. The method of producing one or more piezoelectric devices comprises a molding process of: molding a mixture of raw materials including piezoelectric ceramic powders and a binding agent immersed in a solvent to form a plurality of sheet-like raw material elements 6 each having a thickness in a range of a few ten microns to a few hundred microns by way of, for example, a Doctor Blade technique, a laminating process of laminating a plurality of sheet-like raw material elements 6 to obtain a piezoelectric element 7, a pressing process of imparting pressing forces to the piezoelectric element 7 to obtain a piezoelectric element 7a having a predetermined shape, and a burning process of burning the piezoelectric element 7a.

10. 发明专利

DE69129925D1 未知
公开(公告)号：DE69129925D1
公开(公告)日：1998-09-10
申请号：DE69129925
申请日：1991-05-24
申请人： MATSUSHITA ELECTRIC IND CO LTD
发明人： AOKI SHINICHIRO , SATO TAKEO , YAMAMOTO MASAKI , TAKEUCHI HIROYUKI , ARAKI NOBUHIRO , SUGIYAMA YOSHIYUKI
IPC分类号： G03F9/00 , H01L21/027 , H01L21/30
摘要： A reticle/wafer alignment system provided with a laser beam source for emitting laser beams, a first optical system portion for a reticle/wafer alignment which consists of a first optical sub-system for receiving laser beams from the laser beam source and projecting the received laser beams onto alignment marks formed on a substrate and made up of diffraction gratings and a second optical sub-system for gathering laser beams diffracted by the alignment marks to form an image thereof, a photoelectric detection portion for performing a photoelectric conversion of the gathered laser beams, a position detecting portion for measuring the position of the substrate based on a signal outputted from the photoelectric detection portion, a second optical system portion for an image processing which consists of a third optical sub-system for illuminating the alignment marks and a fourth optical sub-system having a television camera for observing the image of the alignment marks, and an image processing portion for performing an image processing of video signals outputted from the television camera. The first and second optical system portions are made in such a manner to have a common part thereof. Thereby, an entire alignment system can be made to be compact. Consequently, a position measurement accuracy can be improved.

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