To make the temperature of a substrate at the time of reaching a processing device uniform in the substrate surface when the substrate is preheated outside the processing device and the heated substrate is held by the transport mechanism and transported to the processing device.SOLUTION: A heating device that heats a substrate before the substrate is transported to a processing device includes a support unit in which a transport mechanism for holding and transporting the substrate between the heating device and the processing device is provided externally, and that supports the substrate, and a heating unit having a light emitting element that emits light such that the substrate supported by the support unit can be heated independently of each other by light for each region divided in a plan view, and the light output of the light emitting element corresponding to a region in the substrate in contact with a substrate holding unit of the transport mechanism is higher than the light output of the light emitting element corresponding to the other region in the substrate.SELECTED DRAWING: Figure 6