基本信息:
- 专利标题: Microfabricated elastomer valve and pump system
- 专利标题(中):微型弹药阀和泵系统
- 申请号:JP2004278576 申请日:2004-09-24
- 公开(公告)号:JP2005096072A 公开(公告)日:2005-04-14
- 发明人: UNGER MARC A , CHOU HOU-PU , THORSEN TODD A , SCHERER AXEL , QUAKE STEPHEN R
- 申请人: California Inst Of Technol , カリフォルニア インスティチュート オブ テクノロジーCalifornia Institute Of Technology
- 专利权人: California Inst Of Technol,カリフォルニア インスティチュート オブ テクノロジーCalifornia Institute Of Technology
- 当前专利权人: California Inst Of Technol,カリフォルニア インスティチュート オブ テクノロジーCalifornia Institute Of Technology
- 优先权: US14150399 1999-06-28; US14719999 1999-08-03; US18685600 2000-03-03
- 主分类号: G03F7/20
- IPC分类号: G03F7/20 ; B01L3/00 ; B81B1/00 ; B81B3/00 ; B81B7/00 ; B81C1/00 ; B81C99/00 ; C12Q1/68 ; F04B17/00 ; F04B35/04 ; F04B43/04 ; F15C5/00 ; F16K7/00 ; F16K17/02 ; F16K99/00
摘要:
PROBLEM TO BE SOLVED: To provide an elastomer valve structure capable of being thinned, being operated with small force and being comparatively easily manufactured as compared with a silicon substrate process, and a pumping system using the structure. SOLUTION: A second flow channel 32 laminated by being made orthogonal to a first flow channel 30 is formed within an elastomer block. A film 25 for forming a top part of the first flow channel 30 separates two flow channels, is a top part of the first flow channel 30, and at the same time, forms a bottom part of the second flow channel 32. By fluctuating pressure of the second flow channel 32, the film 25 repeats bending and recovering to a lower side, and thereby the first flow channel 30 constitutes a valve operation system of a linear operation. COPYRIGHT: (C)2005,JPO&NCIPI
摘要(中):
要解决的问题:提供一种与硅衬底工艺相比能够减薄,与较小力相比较容易制造的弹性体阀结构,以及使用该结构的泵送系统。 解决方案:在弹性体块内形成通过与第一流动通道30正交地层压的第二流动通道32。 用于形成第一流动通道30的顶部的膜25分离两个流动通道,即第一流动通道30的顶部,并且同时形成第二流动通道32的底部。通过波动的压力 在第二流路32中,膜25重复弯曲并回收到下侧,由此第一流路30构成线性运转的阀操作系统。 版权所有(C)2005,JPO&NCIPI