基本信息:
- 专利标题: Micro-positioning device and machine tool correcting method
- 申请号:JP2003160308 申请日:2003-06-05
- 公开(公告)号:JP2004358611A 公开(公告)日:2004-12-24
- 发明人: SAWADA KIYOSHI , EBIHARA KENZO , SAKAIDA YASUHIRO
- 申请人: Fanuc Ltd , ファナック株式会社
- 专利权人: Fanuc Ltd,ファナック株式会社
- 当前专利权人: Fanuc Ltd,ファナック株式会社
- 优先权: JP2003160308 2003-06-05
- 主分类号: B23Q5/22
- IPC分类号: B23Q5/22 ; B23Q1/34 ; B23Q5/28 ; G05D3/00 ; H01L41/09
摘要:
PROBLEM TO BE SOLVED: To provide a micro-positioning device and a machine tool position posture correcting method exhibiting machine rigidity and capable of achieving positioning accuracy in nano-order.
SOLUTION: A driving element is constituted by two of piezo elements P1 and P2 arranged on a straight line along the expansion direction. Both ends of the piezo element P1 along the expansion direction are respectively fixed on a base member 1 and a movable member 2. Only one end of the piezo element P2 is fixed on the base member 1. An interval L is formed between the piezo element P2 and the movable member 2. When elongation displacement amounts of the piezo elements P1 and P2 are a1 and a2 respectively, the voltage applied to the piezo elements P1 and P2 is controlled as follows; a1+a2=a≥L. The movable member 2 can be positioned in a position within the maximum stroke (a) in nano-order. The driving element is arranged in the perpendicular direction, and the positioning device of 2-freedom or 6-freedom by including a rotating shaft can be achieved.
COPYRIGHT: (C)2005,JPO&NCIPI
SOLUTION: A driving element is constituted by two of piezo elements P1 and P2 arranged on a straight line along the expansion direction. Both ends of the piezo element P1 along the expansion direction are respectively fixed on a base member 1 and a movable member 2. Only one end of the piezo element P2 is fixed on the base member 1. An interval L is formed between the piezo element P2 and the movable member 2. When elongation displacement amounts of the piezo elements P1 and P2 are a1 and a2 respectively, the voltage applied to the piezo elements P1 and P2 is controlled as follows; a1+a2=a≥L. The movable member 2 can be positioned in a position within the maximum stroke (a) in nano-order. The driving element is arranged in the perpendicular direction, and the positioning device of 2-freedom or 6-freedom by including a rotating shaft can be achieved.
COPYRIGHT: (C)2005,JPO&NCIPI
公开/授权文献:
- JP3792675B2 Fine positioning device and the tool correction method 公开/授权日:2006-07-05
信息查询:
EspacenetIPC结构图谱:
B | 作业;运输 |
--B23 | 机床;不包含在其他类目中的金属加工 |
----B23Q | 机床的零件、部件或附件,如仿形装置或控制装置;以特殊零件或部件的结构为特征的通用机床;不针对某一特殊金属加工用途的金属加工机床的组合或联合 |
------B23Q5/00 | 驱动机构或进给机构;及其所用的控制装置 |
--------B23Q5/22 | .支承刀具或工件的部件的进给 |