PROBLEM TO BE SOLVED: To provide an air hydrostatic bearing having extremely small vibration while bearing rigidity is maintained. SOLUTION: A slide 2 is supported against a guide member 1 with a bearing gap 3. Air is fed into the bearing gap 3 through a primary pipe 11, a diverged pipe 11, and an orifice 12 which are arranged on the slide 2. Forms of pipes such as a size in diameter, a shape, and numbers or the like are determined so that Reynolds number becomes not larger than 2,000 at each part of the primary pipe 10, the diverged pipe 11, the orifice 12, and the bearing gap 3 (the diameter of the primary pipe 10 which is apt to generate a turbulent flow is formed larger) so that a turbulent flow is not generated. Because no turbulent flow is caused at each part, vibration is not generated, and the air hydrostatic bearing being stable at precision of not greater than one nanometer is realized. COPYRIGHT: (C)2003,JPO