基本信息:
- 专利标题: FAR ULTRAVIOLET RAYS CATADIOPTRIC ANAMORPHIC TELESCOPE
- 申请号:JP2000403667 申请日:2000-11-29
- 公开(公告)号:JP2001264688A 公开(公告)日:2001-09-26
- 发明人: SMITH SCOTT T
- 申请人: CYMER INC
- 专利权人: CYMER INC
- 当前专利权人: CYMER INC
- 优先权: US45091999 1999-11-29
- 主分类号: G02B13/08
- IPC分类号: G02B13/08 ; G02B13/14 ; G02B17/08 ; G02B27/09 ; G03F7/20 ; H01S3/00 ; H01S3/10 ; H01S3/225
摘要:
PROBLEM TO BE SOLVED: To provide a far ultraviolet rays catadioptric anamorphic telescope to be used for narrowing the band of the beam width of a pulse laser comprising a pulse electric discharge laser. SOLUTION: The telescope is provided with an off-axis projected spherical surface reflector and a reflection/refraction optical element combined by off-axis, and is generally known as a Mangin mirror 206, a first refraction surface and a reflection rear surface are arranged and an aberration derived by the off-axis deflection of a beam 202 is cancelled. The telescope 205 is especially useful for far ultraviolet rays (DUV) by wave length being shorter than about 250 nm. In a certain application, diffraction grating or another wave length scattering element arrayed to reversely reflecting a selection wave length is irradiated in the telescope. In another application, the telescope combined with the diffraction grating is incorporated inside a laser optical cavity so that the band of the output wave length of the laser is narrowed. Besides, an improved general purpose DUV beam expander is provided.
公开/授权文献:
- JP3499824B2 Deep ultraviolet catadioptric anamorphic telescope 公开/授权日:2004-02-23
信息查询:
EspacenetIPC结构图谱:
G | 物理 |
--G02 | 光学 |
----G02B | 光学元件、系统或仪器 |
------G02B13/00 | 为下述用途专门设计的光学物镜 |
--------G02B13/08 | .变形物镜 |