基本信息:
- 专利标题： Determination of emission parameters from field emission sources
- 专利标题（中）：的场发射源发射参数的确定
- 申请号：EP13150442.5 申请日：2013-01-08
- 公开(公告)号：EP2613338A3 公开(公告)日：2015-04-08
- 发明人： Swanson, Lynwood , Schwind, Gregory , Kellogg, Sean , Liu, Kun
- 申请人： FEI Company
- 申请人地址： 5350 NE Dawson Creek Drive Hillsboro, OR 97124-5793 US
- 专利权人： FEI Company
- 当前专利权人： FEI Company
- 当前专利权人地址： 5350 NE Dawson Creek Drive Hillsboro, OR 97124-5793 US
- 代理机构： Bakker, Hendrik
- 优先权： US201261584762P 20120109; US201213648887 20121010
- 主分类号： H01J37/073
- IPC分类号： H01J37/073
摘要：
The state of an emitter can be determined by measurements of how the current changes with the extraction voltage. A field factor β function is determined by a series of relatively simple measurements of charged particles emitted at different conditions. The field factor can then be used to determine derived characteristics of the emission that, in the prior art, were difficult to determine without removing the source from the focusing column and mounting it in a specialized apparatus. The relations are determined by the source configuration and have been found to be independent of the emitter shape, and so emission character can be determined as the emitter shape changes over time, without having to determine the emitter shape and without having to redefine the relation between the field factor and the series of relatively simple measurements, and the relationships between the field factor and other emission parameters.
公开/授权文献:
IPC结构图谱:
| H | 电学 |
| --H01 | 基本电气元件 |
| ----H01J | 放电管或放电灯 |
| ------H01J37/00 | 有把物质或材料引入使受到放电作用的结构的电子管,如为了对其检验或加工的 |
| --------H01J37/02 | .零部件 |
| ----------H01J37/04 | ..电极装置及与产生或控制放电的部件有关的装置，如电子光学装置，离子光学装置 |
| ------------H01J37/06 | ...电子源；电子枪 |
| --------------H01J37/073 | ....应用场致发射、光电发射或二次电子发射源的电子枪 |