
基本信息:
- 专利标题: INJECTION SEEDED LASER WITH PRECISE TIMING CONTROL
- 专利标题(中):注射激光精密时序同步
- 申请号:EP02731237.0 申请日:2002-04-02
- 公开(公告)号:EP1378036B1 公开(公告)日:2009-04-01
- 发明人: NESS, Richard, M. , SANDSTROM, Richard, L. , PARTLO, William, N. , ERSHOV, Alexander, I.
- 申请人: Cymer, Inc.
- 申请人地址: 17075 Thornmint Court San Diego, CA 92127 US
- 专利权人: Cymer, Inc.
- 当前专利权人: Cymer, Inc.
- 当前专利权人地址: 17075 Thornmint Court San Diego, CA 92127 US
- 代理机构: Grünecker, Kinkeldey, Stockmair & Schwanhäusser Anwaltssozietät
- 优先权: US829475 20010409; US848043 20010503
- 国际公布: WO2002082597 20021017
- 主分类号: H01S3/225
- IPC分类号: H01S3/225 ; H01S3/134 ; H01S3/105
摘要:
A narrow band laser system having two laser subsystems. The first laser subsystem is configured to provide a very narrow band pulsed output beam which is used to injection seed the second laser subsystem where the narrow band pulsed seed beam is amplified to produce a narrow band pulsed output beam. A pulse power supply is provided which is specially configured to precisely time the discharges in the two laser subsystem so that the discharges are properly synchronized. Preferred embodiments include a pulse power system with a pulse transformer unit having two sets of transformer cores. A single upstream pulse compression circuit provides high voltage pulses in parallel to the primary windings of all of the cores in both sets. Separate secondary conductors (one passing through one set of cores and the other passing through the other set of cores) provide very high voltage pulses respectively to separate downstream circuits supplying discharge pulses to the electrodes in each of two separate laser chambers. Preferred embodiments include KrF, ArF and F2 systems. In these preferred embodiments, line narrowing may be accomplished within the resonant cavity of the seed laser or the output of the seed laser could be line narrowed using a pre-gain filter.
公开/授权文献:
- EP1378036A1 INJECTION SEEDED LASER WITH PRECISE TIMING CONTROL 公开/授权日:2004-01-07
IPC结构图谱:
H | 电学 |
--H01 | 基本电气元件 |
----H01S | 利用受激发射的器件 |
------H01S3/00 | 激光器,即利用受激发射对红外光、可见光或紫外线进行产生、放大、调制、解调或变频的器件 |
--------H01S3/10 | .控制辐射的强度、频率、相位、极化或方向,例如开关、选通、调制或解调 |
----------H01S3/16 | ..固体材料 |
------------H01S3/223 | ...激光气体是多原子的,即含有1个原子以上的 |
--------------H01S3/225 | ....包括1种激发物或激态复合物 |