基本信息:
- 专利标题： LASER WAVELENGTH CONTROL UNIT WITH PIEZOELECTRIC DRIVER
- 专利标题（中）：带压电驱动器激光波长控制单元
- 申请号：EP01954584 申请日：2001-04-30
- 公开(公告)号：EP1310022A4 公开(公告)日：2007-07-04
- 发明人： SPANGLER RONALD L , JACQUES ROBERT N , EVERAGE GEORGE J , ANDERSON STUART L , PALENSCHAT FREDERICK A , FOMENKOV IGOR V , SANDSTROM RICHARD L , PARTLO WILLIAM N , ALGOTS JOHN M , BROWN DANIEL J W
- 申请人： CYMER INC
- 专利权人： CYMER INC
- 当前专利权人： CYMER INC
- 优先权： US59781200 2000-06-19; US68462900 2000-10-06; US79478201 2001-02-27
- 主分类号： H01S3/137
- IPC分类号： H01S3/137 ; G03F7/20 ; H01S3/036 ; H01S3/038 ; H01S3/04 ; H01S3/041 ; H01S3/097 ; H01S3/0971 ; H01S3/0975 ; H01S3/104 ; H01S3/105 ; H01S3/1055 ; H01S3/11 ; H01S3/13 ; H01S3/131 ; H01S3/134 ; H01S3/22 ; H01S3/225
摘要：
Fast wavelenght correction equipment for an electric discharge laser includes at least one piezoelectic drive (80) and a fast wavelength measurement system and a fast feedback response time. In a preferred embodiment equipment is provided to control wavelength on a slow, intermediate amd fast time scales, which vary in range from several milliseconds to a few microseconds respectively. Techniques include a combination of a relatively slow stepper motor (82) and a very fast piezoelectric drive (80) for tuning the laser wavelength using a tuning mirror (14).
IPC结构图谱:
| H | 电学 |
| --H01 | 基本电气元件 |
| ----H01S | 利用受激发射的器件 |
| ------H01S3/00 | 激光器，即利用受激发射对红外光、可见光或紫外线进行产生、放大、调制、解调或变频的器件 |
| --------H01S3/10 | .控制辐射的强度、频率、相位、极化或方向，例如开关、选通、调制或解调 |
| ----------H01S3/102 | ..由控制激活媒质，例如通过控制激励的方法或设备 |
| ------------H01S3/131 | ...由控制激活手段，例如通过控制激励方法或设备 |
| --------------H01S3/137 | ....用于稳定频率的 |