基本信息:
- 专利标题： HIGH PULSE RATE PULSE POWER SYSTEM
- 专利标题（中）：具有高脉冲频率脉冲发生器系统
- 申请号：EP99930661.6 申请日：1999-06-24
- 公开(公告)号：EP1101258B1 公开(公告)日：2005-05-11
- 发明人： PARTLO, William, N. , BIRX, Daniel, L. , NESS, Richard, M. , ROTHWEIL, Daniel, A. , MELCHER, Paul, C. , SMITH, Brett, D.
- 申请人： Cymer, Inc.
- 申请人地址： 17075 Thornmint Court San Diego, CA 92127 US
- 专利权人： Cymer, Inc.
- 当前专利权人： Cymer, Inc.
- 当前专利权人地址： 17075 Thornmint Court San Diego, CA 92127 US
- 代理机构： Grünecker, Kinkeldey, Stockmair & Schwanhäusser Anwaltssozietät
- 优先权： US118773 19980718
- 国际公布： WO2000004612 20000127
- 主分类号： H01S3/097
- IPC分类号： H01S3/097 ; H01S3/0971 ; H03K3/57 ; H03K17/80
摘要：
A high pulse rate pulse power source (20) for supplying controlled high energy electrical pulses at rates of 2000 Hz or greater. The source (20) includes a pulse generating circuit (30) including a charging capacitor (42), a solid state switch (46) and a current limiting inductor (48). Pulses generated in the pulse generating circuit (30) are compressed in at least two pulse compression circuits (61, 65) and a step-up pulse transformer (56) increases peak voltage to at least 12,000 volts. A very fast regulated power supply is provided for charging the charging capacitor (42) in less than 400 microseconds and a pulse control system including a programmed processor (102) controls the charging of the charging capacitor (42) to an accuracy of less than about one percent at a rate of at least 2000 charges per second.
公开/授权文献:
- EP1101258A1 HIGH PULSE RATE PULSE POWER SYSTEM 公开/授权日：2001-05-23