![一种压电式MEMS声传感器](/CN/2019/1/223/images/201911117499.jpg)
基本信息:
- 专利标题: 一种压电式MEMS声传感器
- 专利标题(英):Piezoelectric MEMS acoustic sensor
- 申请号:CN201911117499.3 申请日:2019-11-15
- 公开(公告)号:CN110793708A 公开(公告)日:2020-02-14
- 发明人: 吴鹏程 , 曾怀望 , 张永平 , 焦文龙
- 申请人: 联合微电子中心有限责任公司
- 申请人地址: 重庆市沙坪坝区西园一路28号附2号
- 专利权人: 联合微电子中心有限责任公司
- 当前专利权人: 联合微电子中心有限责任公司
- 当前专利权人地址: 重庆市沙坪坝区西园一路28号附2号
- 代理机构: 重庆中之信知识产权代理事务所
- 代理人: 廖天云
- 主分类号: G01L9/08
- IPC分类号: G01L9/08
The invention provides a piezoelectric MEMS acoustic sensor, which comprises a substrate, an internal electrode area and an external electrode area. The external electrode area is arranged at the periphery of the internal electrode area. Each of the internal electrode area and the external electrode area includes a top electrode, an upper piezoelectric layer, an intermediate electrode, a lower piezoelectric layer and a bottom electrode which are stacked from top to bottom. The top electrode, the intermediate electrode and the bottom electrode in the internal electrode area are spaced apart from the top electrode, the intermediate electrode and the bottom electrode in the external electrode area. A lower supporting layer is arranged at the top of the substrate; the internal electrode area and the external electrode area are both arranged on the lower supporting layer; and upper supporting layers made of silicon-based materials are arranged on the top face of the internal electrode areaand the top face of the external electrode area. The piezoelectric MEMS acoustic sensor has advantages of high sensitivity and enhanced hydrostatic pressure resistance; and the MEMS acoustic sensor can meet the application requirements of different pressure resistance and working water depths.
公开/授权文献:
- CN110793708B 一种压电式MEMS声传感器 公开/授权日:2021-12-03
IPC结构图谱:
G | 物理 |
--G01 | 测量;测试 |
----G01L | 测量力、应力、转矩、功、机械功率、机械效率或流体压力 |
------G01L9/00 | 用电或磁的压敏元件测量流体或流动固体材料的稳定或准稳定压力;用电或磁的方法传递或指示机械压敏元件的位移,该机械压敏元件是用来测量流体或流动固体材料的稳定或准稳定压力的 |
--------G01L9/08 | .利用压电器件的 |