
基本信息:
- 专利标题: 一种静态工作点温度稳定的共路干涉电场传感器
- 专利标题(英):Common-path interference electric field sensor with stable temperature of quiescent operating point
- 申请号:CN201811405897.0 申请日:2018-11-23
- 公开(公告)号:CN109507490A 公开(公告)日:2019-03-22
- 发明人: 曾嵘 , 庄池杰 , 汪海 , 马昕雨
- 申请人: 清华大学
- 申请人地址: 北京市海淀区双清路30号
- 专利权人: 清华大学
- 当前专利权人: 清华大学
- 当前专利权人地址: 北京市海淀区双清路30号
- 代理机构: 北京君泊知识产权代理有限公司
- 代理人: 王程远; 胡玉章
- 主分类号: G01R29/12
- IPC分类号: G01R29/12 ; G01R1/44
The invention relates to a common-path interference electric field sensor with stable temperature of quiescent operating point and belongs to the technical field of optical electric field measurement.The common-path interference electric field sensor comprises a lithium niobate crystal, a titanium-diffused lithium niobate waveguide, electrodes and an antenna; a propagating direction of the titanium-diffused lithium niobate waveguide is z axis; titanium dioxide is used as a magnetron sputtering target to perform magnetron sputtering on the upper surface of the titanium-diffused lithium niobatewaveguide; magnetron sputtering pressure is 2.5-5 millitorrs; magnetron sputtering time is 2-16.5 hours; titanium dioxide film is formed on the upper surface of the titanium-diffused lithium niobatewaveguide. The titanium-diffused lithium niobate waveguide is coated with a layer of titanium dioxide film; positive temperature coefficient of the titanium-diffused lithium niobate waveguide is compensated without affecting original measurement sensitivity and accuracy of an existing sensor; therefore, temperature stability of the quiescent operating point of the sensor is greatly improved.
公开/授权文献:
- CN109507490B 一种静态工作点温度稳定的共路干涉电场传感器 公开/授权日:2020-10-16
IPC结构图谱:
G | 物理 |
--G01 | 测量;测试 |
----G01R | 测量电变量;测量磁变量(通过转换成电变量对任何种类的物理变量进行测量参见G01类名下的 |
------G01R29/00 | 不包括在G01R19/00至G01R27/00各组中的电量的测量或指示装置 |
--------G01R29/12 | .静电场的测量 |