![一种微质量传感器的非接触式EMAT检测方法及其系统](/CN/2018/1/222/images/201811114399.jpg)
基本信息:
- 专利标题: 一种微质量传感器的非接触式EMAT检测方法及其系统
- 申请号:CN201811114399.0 申请日:2018-09-25
- 公开(公告)号:CN109282879B 公开(公告)日:2019-07-23
- 发明人: 付琛 , 范晓明 , 黄锐 , 吴永桢 , 罗景庭 , 戴宏飞
- 申请人: 深圳大学
- 申请人地址: 广东省深圳市南山区南海大道3688号
- 专利权人: 深圳大学
- 当前专利权人: 惠雨恩科技(深圳)有限公司
- 当前专利权人地址: 广东省深圳市南山区南海大道3688号
- 代理机构: 深圳市君胜知识产权代理事务所
- 代理人: 王永文; 刘文求
- 主分类号: G01G3/16
- IPC分类号: G01G3/16 ; G01G7/02
The invention provides a non-contact EMAT (Electromagnetic Acoustic Transducer) detection method and system for a micro-mass sensor. According to the invention, an electrostatic magnetic field is generated by magnets, sinusoidal alternating current is introduced into an excitation coil, a resonance piece is placed above the excitation coil, and resonance is generated when the frequency of the excitation coil is the same as the intrinsic frequency of the resonance piece, so that a secondary alternating magnetic field is induced, and in induction current is generated in a differential detectioncoil; and when a minute amount of substance to be measured is adsorbed to a sensitive thin layer covered on the upper surface of the resonance piece, the resonant frequency of the resonance piece drifts, and the substance to be measured is quantitatively measured through calculating the drifting amount of the resonant frequency. The EMAT is introduced, the acoustic vibration is excited and detected by using electromagnetic induction so as to realize a non-contact scheme, complex structures such as a micro-cantilever beam structure are replaced by the simple structure, and the absolute frequency shift is replaced by the relative frequency difference between different modes, thereby reducing disturbance caused by the external environment, and realizing high-precision measurement for the micro-mass substance.
公开/授权文献:
- CN109282879A 一种微质量传感器的非接触式EMAT检测方法及其系统 公开/授权日:2019-01-29
IPC结构图谱:
G | 物理 |
--G01 | 测量;测试 |
----G01G | 称量 |
------G01G3/00 | 以应用可产生弹性形变的元件为特征的称量仪器,例如弹簧秤 |
--------G01G3/12 | .其中称量部件当称量时处于受压力或张力作用的固体形式 |
----------G01G3/16 | ..测量物体振荡频率的变化 |