基本信息:
- 专利标题： 石墨烯-碳纳米管FET器件的加工方法
- 专利标题（英）：Method for processing graphene-carbon nanotube FET device
- 申请号：CN201810877768.5 申请日：2018-08-03
- 公开(公告)号：CN109052317A 公开(公告)日：2018-12-21
- 发明人： 解双喜 , 秦莉莉 , 王亚锋 , 贠革鑫 , 孔振威 , 李光喜 , 陈凡 , 曹森鹏 , 赵志敏 , 代克杰
- 申请人： 平顶山学院
- 申请人地址： 河南省平顶山市新城区未来路南段
- 专利权人： 平顶山学院
- 当前专利权人： 平顶山学院
- 当前专利权人地址： 河南省平顶山市新城区未来路南段
- 代理机构： 郑州豫开专利代理事务所
- 代理人： 朱俊峰
- 主分类号： B82Y40/00
- IPC分类号： B82Y40/00 ; H01L29/40 ; H01L29/772
A method for processing graphene-carbon nanotube FET device comprises the following steps of: (1) assembling a graphene sheet on a cutting processing system; (2) setting cutting force, cutting speed and cutting path to the cutting processing system; (3) cutting the graphene sheet into graphene nanobelts; (4) processing a graphene nano-electrode; (5) establishing a stress model of a single-walled carbon nanotube in a non-uniform electric field; (6) titrating the single-walled carbon nanotube solution into the nano gap after the graphene nano-electrode is cut off. The processing method has the advantages of high precision, strong robustness, simple operation, flexibility and low cost. The processed graphene nano-electrode with the nano gap can be used as a probe for the nano point electricalproperty test and the detection of the biological molecules in a micro-environment, has higher sensitivity, and provides a new way for constructing micro-nano electronic equipment with smaller sizesand higher performances.
公开/授权文献:
- CN109052317B 石墨烯-碳纳米管FET器件的加工方法 公开/授权日：2021-10-01
IPC结构图谱:
| B | 作业；运输 |
| --B82 | 超微技术 |
| ----B82Y | 纳米结构的特定用途或应用；纳米结构的测量或分析；纳米结构的制造或处理 |
| ------B82Y40/00 | 纳米结构的制造或处理 |