
基本信息:
- 专利标题: 一种基于光学微腔的全解耦环形微陀螺仪及其加工方法
- 专利标题(英):Full decoupling annular micro gyroscope based on optical microcavities and processing method thereof
- 申请号:CN201810809702.2 申请日:2018-07-23
- 公开(公告)号:CN108955664A 公开(公告)日:2018-12-07
- 发明人: 夏敦柱 , 黄泠潮 , 赵立业
- 申请人: 东南大学
- 申请人地址: 江苏省南京市江宁区东南大学路2号
- 专利权人: 东南大学
- 当前专利权人: 东南大学
- 当前专利权人地址: 江苏省南京市江宁区东南大学路2号
- 代理机构: 南京苏高专利商标事务所
- 代理人: 徐红梅
- 主分类号: G01C19/5698
- IPC分类号: G01C19/5698
The invention discloses a full decoupling annular micro gyroscope based on optical microcavities and a processing method thereof. The micro gyroscope comprises a cover cap and a wafer from top to bottom. The wafer comprises an upper apparatus layer and a lower substrate layer. The apparatus layer is provided with a plurality of electrodes, a harmonic oscillator, a first optical microcavity, a second optical microcavity, a first light wave guide and a second light wave guide. The electrodes are adjacent to the inner wall of the harmonic oscillator to form a capacitor; the first light wave guideand the second light wave guide are symmetrically distributed on two sides of the harmonic oscillator; the first and second optical microcavities are adjacent to the first light wave guide and the second light wave guide, separately, and the first and second optical microcavities are connected to the harmonic oscillator. By adopting an optical detection scheme, compared with a conventional micro-mechanical and electric gyroscope, the reliability and measuring precision of the gyroscope can reach a higher level.
公开/授权文献:
- CN108955664B 一种基于光学微腔的全解耦环形微陀螺仪及其加工方法 公开/授权日:2020-07-14
IPC结构图谱:
G | 物理 |
--G01 | 测量;测试 |
----G01C | 测量距离、水准或者方位;勘测;导航;陀螺仪;摄影测量学或视频测量学 |
------G01C19/00 | 陀螺仪;带有振动部件的转动敏感装置;不带有运动部件的转动敏感装置 |
--------G01C19/02 | .旋转式陀螺仪 |
----------G01C19/5698 | ..利用声波,例如:表面声波陀螺仪 |