
基本信息:
- 专利标题: 一种小型离子源及其制备方法
- 专利标题(英):Small-sized ion source and preparation method thereof
- 申请号:CN201810254355.1 申请日:2018-03-26
- 公开(公告)号:CN108428610A 公开(公告)日:2018-08-21
- 发明人: 陈泽祥 , 吴庆阳 , 刘梦龙 , 李小兵
- 申请人: 电子科技大学
- 申请人地址: 四川省成都市高新区(西区)西源大道2006号
- 专利权人: 电子科技大学
- 当前专利权人: 电子科技大学
- 当前专利权人地址: 四川省成都市高新区(西区)西源大道2006号
- 代理机构: 成都弘毅天承知识产权代理有限公司
- 代理人: 徐金琼
- 主分类号: H01J37/08
- IPC分类号: H01J37/08 ; H01J1/304 ; H01J9/02 ; H01J9/18
The invention discloses a small-sized ion source and a preparation method thereof, and belongs to the technical field of ion generation of field emission electron ionization gas. The problems are solved that existing ion sources are complex in structure, large in size, high in cost and inconvenient to use, the magnitude of current of an ion beam generated by the existing ion sources is very difficult to control, and real-time adjustment cannot be achieved. The small-sized ion source comprises an insulating sleeve, electron guns encapsulated at both ends of the insulating sleeve and used for generating high-energy electrons, second grid electrodes, focusing electrodes, extraction electrodes for extracting an ion beam and the like; gas inlets are formed in the portions, at the ends of the electron guns, of the insulating sleeve; the electron guns include insulating bases, field electron emission electrodes which are encapsulated on the insulating bases and connected with the ground or negative voltage and first grid electrodes connected with positive high voltage. The small-sized ion source is used for generating the ion beam.
公开/授权文献:
- CN108428610B 一种小型离子源及其制备方法 公开/授权日:2020-09-04
IPC结构图谱:
H | 电学 |
--H01 | 基本电气元件 |
----H01J | 放电管或放电灯 |
------H01J37/00 | 有把物质或材料引入使受到放电作用的结构的电子管,如为了对其检验或加工的 |
--------H01J37/02 | .零部件 |
----------H01J37/04 | ..电极装置及与产生或控制放电的部件有关的装置,如电子光学装置,离子光学装置 |
------------H01J37/08 | ...离子源;离子枪 |