![一种集成亚波长结构的聚合物和纳米材料的InGaAs探测器](/CN/2018/1/18/images/201810090438.jpg)
基本信息:
- 专利标题: 一种集成亚波长结构的聚合物和纳米材料的InGaAs探测器
- 申请号:CN201810090438.1 申请日:2018-01-30
- 公开(公告)号:CN108400172B 公开(公告)日:2019-09-27
- 发明人: 于一榛 , 何玮 , 曹高奇 , 邓双燕 , 杨波 , 邵秀梅 , 李雪 , 龚海梅
- 申请人: 中国科学院上海技术物理研究所
- 申请人地址: 上海市虹口区玉田路500号
- 专利权人: 中国科学院上海技术物理研究所
- 当前专利权人: 中国科学院上海技术物理研究所
- 当前专利权人地址: 上海市虹口区玉田路500号
- 代理机构: 上海沪慧律师事务所
- 代理人: 李秀兰
- 主分类号: H01L31/0216
- IPC分类号: H01L31/0216 ; H01L31/105
The invention discloses an InGaAs detector integrating a polymer and nano material with a sub-wavelength structure. The structure of the InGaAs detector sequentially includes the polymer and nano material with the sub-wavelength structure, an InP buffer layer, an InGaAs absorbing layer, an InP cap layer, a SiO2 dielectric layer, a photosensitive chip indium column, a readout circuit indium columnand a readout circuit from top to bottom. The advantages of the invention are that: firstly, by integrating a high-refractive-index sub-wavelength material, the quantum efficiency of a traditional visible expanded InGaAs device can be further improved; secondly, compared with a traditional anti-reflection film material, the polymers and nano materials based on the sub-wavelength structure have a high degree of material and structural regulation, and further have high production efficiency and lower production costs; and thirdly, the sub-wavelength structure can reduce the complexity and size of a detection system and also has process compatibility with the detector.
公开/授权文献:
- CN108400172A 一种集成亚波长结构的聚合物和纳米材料的InGaAs探测器 公开/授权日:2018-08-14