基本信息:
- 专利标题: 紧凑型柔性基材磁控溅射镀膜设备及方法
- 专利标题(英):Compact type flexible substrate magneto-controlled sputter coating equipment and method
- 申请号:CN201610514495.9 申请日:2016-06-30
- 公开(公告)号:CN106048546A 公开(公告)日:2016-10-26
- 发明人: 朱建明 , 李金清
- 申请人: 肇庆市科润真空设备有限公司
- 申请人地址: 广东省肇庆市端州大道
- 专利权人: 肇庆市科润真空设备有限公司
- 当前专利权人: 肇庆市科润真空设备有限公司
- 当前专利权人地址: 广东省肇庆市端州大道
- 代理机构: 广州市华学知识产权代理有限公司
- 代理人: 谢静娜; 裘晖
- 主分类号: C23C14/35
- IPC分类号: C23C14/35 ; C23C14/54 ; C23C14/56
The invention discloses compact type flexible substrate magneto-controlled sputter coating equipment and method. According to the equipment, a partition clapboard is arranged in a vacuum chamber, space in the vacuum chamber is divided into a winding area and a coating area, the partition clapboard is provided with a through hole for a flexible substrate to pass through, the flexible substrate penetrates the whole vacuum chamber, a heater and an ion source are arranged in the winding area, a magneto-controlled sputter device is arranged in the coating area, multiple unit clapboards are arranged in the coating area, and space in the coating area is divided into one flexible substrate conveying unit and multiple coating units. According to the method, the winding area and the coating area in the vacuum chamber are vacuumized, and the flexible substrate unwound by an unwinding roller passes through the winding area firstly, and is subjected to ion treatment and preheating in the winding area, then conveyed into the coating area, subjected to sputter coating through the multiple coating units in sequence and finally conveyed to the winding area to be wound through a winding roller. The equipment is compact in structure, saves equipment cost and can effectively prevent work atmospheres of the different process stages from influencing one another.
公开/授权文献:
- CN106048546B 紧凑型柔性基材磁控溅射镀膜设备及方法 公开/授权日:2018-10-23
