基本信息:
- 专利标题： 边缘检测偏差校正值计算、边缘检测偏差校正方法及设备
- 专利标题（英）：EDGE DETECTION BIAS CORRECTION VALUE CALCULATION METHOD, EDGE DETECTION BIAS CORRECTION METHOD, AND EQUIPMENT
- 申请号：CN201610195301.3 申请日：2016-03-30
- 公开(公告)号：CN106017313A 公开(公告)日：2016-10-12
- 发明人： 吉田博行 , 高田彰 , 海江田诚 , 张玉武 , 小松浩一 , 浅野秀光 , 花村尚史 , 前田拓甫 , 德原功
- 申请人： 株式会社三丰
- 申请人地址： 日本神奈川县
- 专利权人： 株式会社三丰
- 当前专利权人： 株式会社三丰
- 当前专利权人地址： 日本神奈川县
- 代理机构： 北京林达刘知识产权代理事务所
- 代理人： 刘新宇
- 优先权： 2015-070758 2015.03.31 JP
- 主分类号： G01B11/00
- IPC分类号： G01B11/00
The invention provides an edge detection bias correction value calculation method, an edge detection bias correction method, and equipment. A distance in a scanning direction between a first set of edges which face each other and exhibit an opposite change between light and dark is measured by an image measuring machine, and a bias correction value is calculated based on a difference between a measured value and a true value. Using the bias correction value, detection point correction values, which are correction values in various directions of edge detection points detected by a scan of a measured object using the image measuring machine, are calculated; a correction amount used in correction of the edge detection points is specified based on the detection point correction value in each direction; and the edge detection points are corrected using the correction amount.
公开/授权文献:
- CN106017313B 边缘检测偏差校正值计算、边缘检测偏差校正方法及设备 公开/授权日：2020-08-07
IPC结构图谱:
| G | 物理 |
| --G01 | 测量；测试 |
| ----G01B | 长度、厚度或类似线性尺寸的计量；角度的计量；面积的计量；不规则的表面或轮廓的计量 |
| ------G01B11/00 | 以采用光学方法为特征的计量设备 |